11/3/2011	9:19:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:19:39 AM	Recipe started at 9:19 AM
11/3/2011	9:19:39 AM	Helium valve closed
11/3/2011	9:19:39 AM	H2 valve closed
11/3/2011	9:19:39 AM	BCl3 valve closed
11/3/2011	9:19:39 AM	PH3 valve closed
11/3/2011	9:19:39 AM	SiCl4 pre valve closed
11/3/2011	9:19:39 AM	SiCl4 post valve closed
11/3/2011	9:19:39 AM	Main Vac valve closed
11/3/2011	9:19:39 AM	Bypass valve closed
11/3/2011	9:19:39 AM	Bubbler valve closed
11/3/2011	9:19:39 AM	Helium MFC set to  0.000000
11/3/2011	9:19:39 AM	H2 MFC set to  0.000000
11/3/2011	9:19:39 AM	BCl3 MFC set to  0.000000
11/3/2011	9:19:39 AM	PHl3 MFC set to  0.000000
11/3/2011	9:19:39 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:19:39 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:19:39 AM	Tube furnace set to 0
11/3/2011	9:19:42 AM	H2 valve closed
11/3/2011	9:19:42 AM	BCl3 valve closed
11/3/2011	9:19:42 AM	PH3 valve closed
11/3/2011	9:19:42 AM	SiCl4 pre valve closed
11/3/2011	9:19:42 AM	SiCl4 post valve closed
11/3/2011	9:19:42 AM	Main Vac valve closed
11/3/2011	9:19:42 AM	Bypass valve closed
11/3/2011	9:19:42 AM	Bubbler valve closed
11/3/2011	9:19:42 AM	Helium valve opened
11/3/2011	9:19:42 AM	Helium MFC set to  500.000000
11/3/2011	9:19:42 AM	H2 MFC set to  0.000000
11/3/2011	9:19:42 AM	BCl3 MFC set to  0.000000
11/3/2011	9:19:42 AM	PHl3 MFC set to  0.000000
11/3/2011	9:19:42 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:19:42 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:19:43 AM	Tube furnace set to 0
11/3/2011	9:20:48 AM	Helium valve closed
11/3/2011	9:20:48 AM	H2 valve closed
11/3/2011	9:20:48 AM	BCl3 valve closed
11/3/2011	9:20:48 AM	PH3 valve closed
11/3/2011	9:20:48 AM	SiCl4 pre valve closed
11/3/2011	9:20:48 AM	SiCl4 post valve closed
11/3/2011	9:20:48 AM	Main Vac valve closed
11/3/2011	9:20:48 AM	Bypass valve closed
11/3/2011	9:20:48 AM	Bubbler valve closed
11/3/2011	9:20:48 AM	Helium MFC set to  0.000000
11/3/2011	9:20:48 AM	H2 MFC set to  0.000000
11/3/2011	9:20:48 AM	BCl3 MFC set to  0.000000
11/3/2011	9:20:48 AM	PHl3 MFC set to  0.000000
11/3/2011	9:20:48 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:20:48 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:20:48 AM	Tube furnace set to 0
11/3/2011	9:20:49 AM	Run finished at 9:20 AM
11/3/2011	9:20:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:24:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	9:24:08 AM	Recipe started at 9:24 AM
11/3/2011	9:24:08 AM	Helium valve closed
11/3/2011	9:24:08 AM	H2 valve closed
11/3/2011	9:24:08 AM	BCl3 valve closed
11/3/2011	9:24:08 AM	PH3 valve closed
11/3/2011	9:24:08 AM	SiCl4 pre valve closed
11/3/2011	9:24:08 AM	SiCl4 post valve closed
11/3/2011	9:24:08 AM	Main Vac valve closed
11/3/2011	9:24:08 AM	Bubbler valve closed
11/3/2011	9:24:08 AM	Bypass valve opened
11/3/2011	9:24:08 AM	Helium MFC set to  0.000000
11/3/2011	9:24:08 AM	H2 MFC set to  0.000000
11/3/2011	9:24:08 AM	BCl3 MFC set to  0.000000
11/3/2011	9:24:08 AM	PHl3 MFC set to  0.000000
11/3/2011	9:24:08 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:24:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:24:08 AM	Tube furnace set to 0
11/3/2011	9:25:11 AM	Helium valve closed
11/3/2011	9:25:11 AM	H2 valve closed
11/3/2011	9:25:11 AM	BCl3 valve closed
11/3/2011	9:25:11 AM	PH3 valve closed
11/3/2011	9:25:11 AM	SiCl4 pre valve closed
11/3/2011	9:25:11 AM	SiCl4 post valve closed
11/3/2011	9:25:11 AM	Main Vac valve closed
11/3/2011	9:25:11 AM	Bubbler valve closed
11/3/2011	9:25:11 AM	Bypass valve opened
11/3/2011	9:25:11 AM	Helium MFC set to  0.000000
11/3/2011	9:25:11 AM	H2 MFC set to  0.000000
11/3/2011	9:25:11 AM	BCl3 MFC set to  0.000000
11/3/2011	9:25:11 AM	PHl3 MFC set to  0.000000
11/3/2011	9:25:11 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:25:11 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:25:11 AM	Tube furnace set to 0
11/3/2011	9:25:59 AM	Helium valve closed
11/3/2011	9:25:59 AM	H2 valve closed
11/3/2011	9:25:59 AM	BCl3 valve closed
11/3/2011	9:25:59 AM	PH3 valve closed
11/3/2011	9:25:59 AM	SiCl4 pre valve closed
11/3/2011	9:25:59 AM	SiCl4 post valve closed
11/3/2011	9:25:59 AM	Bypass valve closed
11/3/2011	9:25:59 AM	Bubbler valve closed
11/3/2011	9:25:59 AM	Main Vac valve opened
11/3/2011	9:25:59 AM	Helium MFC set to  0.000000
11/3/2011	9:25:59 AM	H2 MFC set to  0.000000
11/3/2011	9:25:59 AM	BCl3 MFC set to  0.000000
11/3/2011	9:25:59 AM	PHl3 MFC set to  0.000000
11/3/2011	9:25:59 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:25:59 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:25:59 AM	Tube furnace set to 0
11/3/2011	9:26:00 AM	Run finished at 9:26 AM
11/3/2011	9:26:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	9:34:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:34:59 AM	Recipe started at 9:34 AM
11/3/2011	9:34:59 AM	Helium valve closed
11/3/2011	9:34:59 AM	H2 valve closed
11/3/2011	9:34:59 AM	BCl3 valve closed
11/3/2011	9:34:59 AM	PH3 valve closed
11/3/2011	9:34:59 AM	SiCl4 pre valve closed
11/3/2011	9:34:59 AM	SiCl4 post valve closed
11/3/2011	9:34:59 AM	Main Vac valve closed
11/3/2011	9:34:59 AM	Bypass valve closed
11/3/2011	9:34:59 AM	Bubbler valve closed
11/3/2011	9:34:59 AM	Helium MFC set to  0.000000
11/3/2011	9:34:59 AM	H2 MFC set to  0.000000
11/3/2011	9:34:59 AM	BCl3 MFC set to  0.000000
11/3/2011	9:34:59 AM	PHl3 MFC set to  0.000000
11/3/2011	9:34:59 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:34:59 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:34:59 AM	Tube furnace set to 0
11/3/2011	9:35:02 AM	H2 valve closed
11/3/2011	9:35:02 AM	BCl3 valve closed
11/3/2011	9:35:02 AM	PH3 valve closed
11/3/2011	9:35:02 AM	SiCl4 pre valve closed
11/3/2011	9:35:02 AM	SiCl4 post valve closed
11/3/2011	9:35:02 AM	Main Vac valve closed
11/3/2011	9:35:02 AM	Bypass valve closed
11/3/2011	9:35:02 AM	Bubbler valve closed
11/3/2011	9:35:02 AM	Helium valve opened
11/3/2011	9:35:02 AM	Helium MFC set to  500.000000
11/3/2011	9:35:02 AM	H2 MFC set to  0.000000
11/3/2011	9:35:02 AM	BCl3 MFC set to  0.000000
11/3/2011	9:35:02 AM	PHl3 MFC set to  0.000000
11/3/2011	9:35:02 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:35:02 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:35:02 AM	Tube furnace set to 0
11/3/2011	9:36:08 AM	Helium valve closed
11/3/2011	9:36:08 AM	H2 valve closed
11/3/2011	9:36:08 AM	BCl3 valve closed
11/3/2011	9:36:08 AM	PH3 valve closed
11/3/2011	9:36:08 AM	SiCl4 pre valve closed
11/3/2011	9:36:08 AM	SiCl4 post valve closed
11/3/2011	9:36:08 AM	Main Vac valve closed
11/3/2011	9:36:08 AM	Bypass valve closed
11/3/2011	9:36:08 AM	Bubbler valve closed
11/3/2011	9:36:08 AM	Helium MFC set to  0.000000
11/3/2011	9:36:08 AM	H2 MFC set to  0.000000
11/3/2011	9:36:08 AM	BCl3 MFC set to  0.000000
11/3/2011	9:36:08 AM	PHl3 MFC set to  0.000000
11/3/2011	9:36:08 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:36:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:36:08 AM	Tube furnace set to 0
11/3/2011	9:36:09 AM	Run finished at 9:36 AM
11/3/2011	9:36:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:39:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	9:39:26 AM	Recipe started at 9:39 AM
11/3/2011	9:39:26 AM	Helium valve closed
11/3/2011	9:39:26 AM	H2 valve closed
11/3/2011	9:39:26 AM	BCl3 valve closed
11/3/2011	9:39:26 AM	PH3 valve closed
11/3/2011	9:39:26 AM	SiCl4 pre valve closed
11/3/2011	9:39:26 AM	SiCl4 post valve closed
11/3/2011	9:39:26 AM	Main Vac valve closed
11/3/2011	9:39:26 AM	Bubbler valve closed
11/3/2011	9:39:26 AM	Bypass valve opened
11/3/2011	9:39:26 AM	Helium MFC set to  0.000000
11/3/2011	9:39:26 AM	H2 MFC set to  0.000000
11/3/2011	9:39:26 AM	BCl3 MFC set to  0.000000
11/3/2011	9:39:26 AM	PHl3 MFC set to  0.000000
11/3/2011	9:39:26 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:39:26 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:39:26 AM	Tube furnace set to 0
11/3/2011	9:40:25 AM	Helium valve closed
11/3/2011	9:40:25 AM	H2 valve closed
11/3/2011	9:40:25 AM	BCl3 valve closed
11/3/2011	9:40:25 AM	PH3 valve closed
11/3/2011	9:40:25 AM	SiCl4 pre valve closed
11/3/2011	9:40:25 AM	SiCl4 post valve closed
11/3/2011	9:40:25 AM	Main Vac valve closed
11/3/2011	9:40:25 AM	Bubbler valve closed
11/3/2011	9:40:25 AM	Bypass valve opened
11/3/2011	9:40:25 AM	Helium MFC set to  0.000000
11/3/2011	9:40:25 AM	H2 MFC set to  0.000000
11/3/2011	9:40:25 AM	BCl3 MFC set to  0.000000
11/3/2011	9:40:25 AM	PHl3 MFC set to  0.000000
11/3/2011	9:40:25 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:40:25 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:40:25 AM	Tube furnace set to 0
11/3/2011	9:41:25 AM	Helium valve closed
11/3/2011	9:41:25 AM	H2 valve closed
11/3/2011	9:41:25 AM	BCl3 valve closed
11/3/2011	9:41:25 AM	PH3 valve closed
11/3/2011	9:41:25 AM	SiCl4 pre valve closed
11/3/2011	9:41:25 AM	SiCl4 post valve closed
11/3/2011	9:41:25 AM	Bypass valve closed
11/3/2011	9:41:25 AM	Bubbler valve closed
11/3/2011	9:41:25 AM	Main Vac valve opened
11/3/2011	9:41:25 AM	Helium MFC set to  0.000000
11/3/2011	9:41:25 AM	H2 MFC set to  0.000000
11/3/2011	9:41:25 AM	BCl3 MFC set to  0.000000
11/3/2011	9:41:25 AM	PHl3 MFC set to  0.000000
11/3/2011	9:41:25 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:41:25 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:41:26 AM	Tube furnace set to 0
11/3/2011	9:41:27 AM	Run finished at 9:41 AM
11/3/2011	9:41:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	9:42:05 AM	Tube furnace set to 1100
11/3/2011	9:42:10 AM	Tube furnace set to 150
11/3/2011	9:45:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:45:17 AM	Recipe started at 9:45 AM
11/3/2011	9:45:17 AM	Helium valve closed
11/3/2011	9:45:17 AM	H2 valve closed
11/3/2011	9:45:17 AM	BCl3 valve closed
11/3/2011	9:45:17 AM	PH3 valve closed
11/3/2011	9:45:17 AM	SiCl4 pre valve closed
11/3/2011	9:45:17 AM	SiCl4 post valve closed
11/3/2011	9:45:17 AM	Main Vac valve closed
11/3/2011	9:45:17 AM	Bypass valve closed
11/3/2011	9:45:17 AM	Bubbler valve closed
11/3/2011	9:45:17 AM	Helium MFC set to  0.000000
11/3/2011	9:45:17 AM	H2 MFC set to  0.000000
11/3/2011	9:45:17 AM	BCl3 MFC set to  0.000000
11/3/2011	9:45:17 AM	PHl3 MFC set to  0.000000
11/3/2011	9:45:17 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:45:17 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:45:17 AM	Tube furnace set to 0
11/3/2011	9:45:20 AM	H2 valve closed
11/3/2011	9:45:20 AM	BCl3 valve closed
11/3/2011	9:45:20 AM	PH3 valve closed
11/3/2011	9:45:20 AM	SiCl4 pre valve closed
11/3/2011	9:45:20 AM	SiCl4 post valve closed
11/3/2011	9:45:20 AM	Main Vac valve closed
11/3/2011	9:45:20 AM	Bypass valve closed
11/3/2011	9:45:20 AM	Bubbler valve closed
11/3/2011	9:45:20 AM	Helium valve opened
11/3/2011	9:45:20 AM	Helium MFC set to  500.000000
11/3/2011	9:45:20 AM	H2 MFC set to  0.000000
11/3/2011	9:45:20 AM	BCl3 MFC set to  0.000000
11/3/2011	9:45:20 AM	PHl3 MFC set to  0.000000
11/3/2011	9:45:20 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:45:20 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:45:20 AM	Tube furnace set to 0
11/3/2011	9:46:23 AM	Helium valve closed
11/3/2011	9:46:23 AM	H2 valve closed
11/3/2011	9:46:23 AM	BCl3 valve closed
11/3/2011	9:46:23 AM	PH3 valve closed
11/3/2011	9:46:23 AM	SiCl4 pre valve closed
11/3/2011	9:46:23 AM	SiCl4 post valve closed
11/3/2011	9:46:23 AM	Main Vac valve closed
11/3/2011	9:46:23 AM	Bypass valve closed
11/3/2011	9:46:23 AM	Bubbler valve closed
11/3/2011	9:46:23 AM	Helium MFC set to  0.000000
11/3/2011	9:46:23 AM	H2 MFC set to  0.000000
11/3/2011	9:46:23 AM	BCl3 MFC set to  0.000000
11/3/2011	9:46:23 AM	PHl3 MFC set to  0.000000
11/3/2011	9:46:23 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:46:23 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:46:23 AM	Tube furnace set to 0
11/3/2011	9:46:24 AM	Run finished at 9:46 AM
11/3/2011	9:46:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	9:49:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	9:49:59 AM	Recipe started at 9:49 AM
11/3/2011	9:49:59 AM	Helium valve closed
11/3/2011	9:49:59 AM	H2 valve closed
11/3/2011	9:49:59 AM	BCl3 valve closed
11/3/2011	9:49:59 AM	PH3 valve closed
11/3/2011	9:49:59 AM	SiCl4 pre valve closed
11/3/2011	9:49:59 AM	SiCl4 post valve closed
11/3/2011	9:49:59 AM	Main Vac valve closed
11/3/2011	9:49:59 AM	Bubbler valve closed
11/3/2011	9:49:59 AM	Bypass valve opened
11/3/2011	9:49:59 AM	Helium MFC set to  0.000000
11/3/2011	9:49:59 AM	H2 MFC set to  0.000000
11/3/2011	9:49:59 AM	BCl3 MFC set to  0.000000
11/3/2011	9:49:59 AM	PHl3 MFC set to  0.000000
11/3/2011	9:49:59 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:49:59 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:49:59 AM	Tube furnace set to 0
11/3/2011	9:51:01 AM	Helium valve closed
11/3/2011	9:51:01 AM	H2 valve closed
11/3/2011	9:51:01 AM	BCl3 valve closed
11/3/2011	9:51:01 AM	PH3 valve closed
11/3/2011	9:51:01 AM	SiCl4 pre valve closed
11/3/2011	9:51:01 AM	SiCl4 post valve closed
11/3/2011	9:51:01 AM	Main Vac valve closed
11/3/2011	9:51:01 AM	Bubbler valve closed
11/3/2011	9:51:01 AM	Bypass valve opened
11/3/2011	9:51:01 AM	Helium MFC set to  0.000000
11/3/2011	9:51:01 AM	H2 MFC set to  0.000000
11/3/2011	9:51:01 AM	BCl3 MFC set to  0.000000
11/3/2011	9:51:01 AM	PHl3 MFC set to  0.000000
11/3/2011	9:51:01 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:51:01 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:51:01 AM	Tube furnace set to 0
11/3/2011	9:52:01 AM	Helium valve closed
11/3/2011	9:52:01 AM	H2 valve closed
11/3/2011	9:52:01 AM	BCl3 valve closed
11/3/2011	9:52:01 AM	PH3 valve closed
11/3/2011	9:52:01 AM	SiCl4 pre valve closed
11/3/2011	9:52:01 AM	SiCl4 post valve closed
11/3/2011	9:52:01 AM	Bypass valve closed
11/3/2011	9:52:01 AM	Bubbler valve closed
11/3/2011	9:52:01 AM	Main Vac valve opened
11/3/2011	9:52:01 AM	Helium MFC set to  0.000000
11/3/2011	9:52:01 AM	H2 MFC set to  0.000000
11/3/2011	9:52:01 AM	BCl3 MFC set to  0.000000
11/3/2011	9:52:01 AM	PHl3 MFC set to  0.000000
11/3/2011	9:52:01 AM	SiCl4 MFC set to  0.000000
11/3/2011	9:52:01 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:52:01 AM	Tube furnace set to 0
11/3/2011	9:52:02 AM	Run finished at 9:52 AM
11/3/2011	9:52:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	10:02:19 AM	Tube furnace set to 100
11/3/2011	10:07:50 AM	Recipe started at 10:07 AM
11/3/2011	10:07:50 AM	Helium valve closed
11/3/2011	10:07:50 AM	H2 valve closed
11/3/2011	10:07:50 AM	BCl3 valve closed
11/3/2011	10:07:50 AM	PH3 valve closed
11/3/2011	10:07:50 AM	SiCl4 pre valve closed
11/3/2011	10:07:50 AM	SiCl4 post valve closed
11/3/2011	10:07:50 AM	Bypass valve closed
11/3/2011	10:07:50 AM	Bubbler valve closed
11/3/2011	10:07:50 AM	Main Vac valve opened
11/3/2011	10:07:50 AM	Helium MFC set to  0.000000
11/3/2011	10:07:50 AM	H2 MFC set to  0.000000
11/3/2011	10:07:50 AM	BCl3 MFC set to  0.000000
11/3/2011	10:07:50 AM	PHl3 MFC set to  0.000000
11/3/2011	10:07:50 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:07:50 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:07:50 AM	Tube furnace set to 150
11/3/2011	10:08:21 AM	H2 valve closed
11/3/2011	10:08:21 AM	BCl3 valve closed
11/3/2011	10:08:21 AM	PH3 valve closed
11/3/2011	10:08:21 AM	SiCl4 pre valve closed
11/3/2011	10:08:21 AM	SiCl4 post valve closed
11/3/2011	10:08:21 AM	Bypass valve closed
11/3/2011	10:08:21 AM	Bubbler valve closed
11/3/2011	10:08:21 AM	Helium valve opened
11/3/2011	10:08:21 AM	Main Vac valve opened
11/3/2011	10:08:21 AM	Helium MFC set to  20.000000
11/3/2011	10:08:21 AM	H2 MFC set to  0.000000
11/3/2011	10:08:21 AM	BCl3 MFC set to  0.000000
11/3/2011	10:08:21 AM	PHl3 MFC set to  0.000000
11/3/2011	10:08:21 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:08:21 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:08:21 AM	Tube furnace set to 150
11/3/2011	10:08:51 AM	Helium valve closed
11/3/2011	10:08:51 AM	H2 valve closed
11/3/2011	10:08:51 AM	BCl3 valve closed
11/3/2011	10:08:51 AM	PH3 valve closed
11/3/2011	10:08:51 AM	SiCl4 pre valve closed
11/3/2011	10:08:51 AM	SiCl4 post valve closed
11/3/2011	10:08:51 AM	Bypass valve closed
11/3/2011	10:08:51 AM	Bubbler valve closed
11/3/2011	10:08:51 AM	Main Vac valve opened
11/3/2011	10:08:51 AM	Helium MFC set to  0.000000
11/3/2011	10:08:51 AM	H2 MFC set to  0.000000
11/3/2011	10:08:51 AM	BCl3 MFC set to  0.000000
11/3/2011	10:08:51 AM	PHl3 MFC set to  0.000000
11/3/2011	10:08:51 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:08:51 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:08:51 AM	Tube furnace set to 150
11/3/2011	10:09:21 AM	H2 valve closed
11/3/2011	10:09:21 AM	BCl3 valve closed
11/3/2011	10:09:21 AM	PH3 valve closed
11/3/2011	10:09:21 AM	SiCl4 pre valve closed
11/3/2011	10:09:21 AM	SiCl4 post valve closed
11/3/2011	10:09:21 AM	Bypass valve closed
11/3/2011	10:09:21 AM	Bubbler valve closed
11/3/2011	10:09:21 AM	Helium valve opened
11/3/2011	10:09:21 AM	Main Vac valve opened
11/3/2011	10:09:21 AM	Helium MFC set to  20.000000
11/3/2011	10:09:21 AM	H2 MFC set to  0.000000
11/3/2011	10:09:21 AM	BCl3 MFC set to  0.000000
11/3/2011	10:09:21 AM	PHl3 MFC set to  0.000000
11/3/2011	10:09:21 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:09:21 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:09:21 AM	Tube furnace set to 150
11/3/2011	10:09:51 AM	Helium valve closed
11/3/2011	10:09:51 AM	H2 valve closed
11/3/2011	10:09:51 AM	BCl3 valve closed
11/3/2011	10:09:51 AM	PH3 valve closed
11/3/2011	10:09:51 AM	SiCl4 pre valve closed
11/3/2011	10:09:51 AM	SiCl4 post valve closed
11/3/2011	10:09:51 AM	Bypass valve closed
11/3/2011	10:09:51 AM	Bubbler valve closed
11/3/2011	10:09:51 AM	Main Vac valve opened
11/3/2011	10:09:51 AM	Helium MFC set to  0.000000
11/3/2011	10:09:51 AM	H2 MFC set to  0.000000
11/3/2011	10:09:51 AM	BCl3 MFC set to  0.000000
11/3/2011	10:09:51 AM	PHl3 MFC set to  0.000000
11/3/2011	10:09:51 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:09:51 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:09:51 AM	Tube furnace set to 150
11/3/2011	10:10:21 AM	H2 valve closed
11/3/2011	10:10:21 AM	BCl3 valve closed
11/3/2011	10:10:21 AM	PH3 valve closed
11/3/2011	10:10:21 AM	SiCl4 pre valve closed
11/3/2011	10:10:21 AM	SiCl4 post valve closed
11/3/2011	10:10:21 AM	Bypass valve closed
11/3/2011	10:10:21 AM	Bubbler valve closed
11/3/2011	10:10:21 AM	Helium valve opened
11/3/2011	10:10:21 AM	Main Vac valve opened
11/3/2011	10:10:21 AM	Helium MFC set to  20.000000
11/3/2011	10:10:21 AM	H2 MFC set to  0.000000
11/3/2011	10:10:21 AM	BCl3 MFC set to  0.000000
11/3/2011	10:10:21 AM	PHl3 MFC set to  0.000000
11/3/2011	10:10:21 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:10:21 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:10:21 AM	Tube furnace set to 150
11/3/2011	10:10:52 AM	Helium valve closed
11/3/2011	10:10:52 AM	H2 valve closed
11/3/2011	10:10:52 AM	BCl3 valve closed
11/3/2011	10:10:52 AM	PH3 valve closed
11/3/2011	10:10:52 AM	SiCl4 pre valve closed
11/3/2011	10:10:52 AM	SiCl4 post valve closed
11/3/2011	10:10:52 AM	Bypass valve closed
11/3/2011	10:10:52 AM	Bubbler valve closed
11/3/2011	10:10:52 AM	Main Vac valve opened
11/3/2011	10:10:52 AM	Helium MFC set to  0.000000
11/3/2011	10:10:52 AM	H2 MFC set to  0.000000
11/3/2011	10:10:52 AM	BCl3 MFC set to  0.000000
11/3/2011	10:10:52 AM	PHl3 MFC set to  0.000000
11/3/2011	10:10:52 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:10:52 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:10:52 AM	Tube furnace set to 150
11/3/2011	10:11:22 AM	H2 valve closed
11/3/2011	10:11:22 AM	BCl3 valve closed
11/3/2011	10:11:22 AM	PH3 valve closed
11/3/2011	10:11:22 AM	SiCl4 pre valve closed
11/3/2011	10:11:22 AM	SiCl4 post valve closed
11/3/2011	10:11:22 AM	Bypass valve closed
11/3/2011	10:11:22 AM	Bubbler valve closed
11/3/2011	10:11:22 AM	Helium valve opened
11/3/2011	10:11:22 AM	Main Vac valve opened
11/3/2011	10:11:22 AM	Helium MFC set to  20.000000
11/3/2011	10:11:22 AM	H2 MFC set to  0.000000
11/3/2011	10:11:22 AM	BCl3 MFC set to  0.000000
11/3/2011	10:11:22 AM	PHl3 MFC set to  0.000000
11/3/2011	10:11:22 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:11:22 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:11:22 AM	Tube furnace set to 150
11/3/2011	10:11:52 AM	Helium valve closed
11/3/2011	10:11:52 AM	H2 valve closed
11/3/2011	10:11:52 AM	BCl3 valve closed
11/3/2011	10:11:52 AM	PH3 valve closed
11/3/2011	10:11:52 AM	SiCl4 pre valve closed
11/3/2011	10:11:52 AM	SiCl4 post valve closed
11/3/2011	10:11:52 AM	Bypass valve closed
11/3/2011	10:11:52 AM	Bubbler valve closed
11/3/2011	10:11:52 AM	Main Vac valve opened
11/3/2011	10:11:52 AM	Helium MFC set to  0.000000
11/3/2011	10:11:52 AM	H2 MFC set to  0.000000
11/3/2011	10:11:52 AM	BCl3 MFC set to  0.000000
11/3/2011	10:11:52 AM	PHl3 MFC set to  0.000000
11/3/2011	10:11:52 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:11:52 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:11:52 AM	Tube furnace set to 150
11/3/2011	10:12:22 AM	H2 valve closed
11/3/2011	10:12:22 AM	BCl3 valve closed
11/3/2011	10:12:22 AM	PH3 valve closed
11/3/2011	10:12:22 AM	SiCl4 pre valve closed
11/3/2011	10:12:22 AM	SiCl4 post valve closed
11/3/2011	10:12:22 AM	Bypass valve closed
11/3/2011	10:12:22 AM	Bubbler valve closed
11/3/2011	10:12:22 AM	Helium valve opened
11/3/2011	10:12:22 AM	Main Vac valve opened
11/3/2011	10:12:22 AM	Helium MFC set to  20.000000
11/3/2011	10:12:22 AM	H2 MFC set to  0.000000
11/3/2011	10:12:22 AM	BCl3 MFC set to  0.000000
11/3/2011	10:12:22 AM	PHl3 MFC set to  0.000000
11/3/2011	10:12:22 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:12:22 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:12:22 AM	Tube furnace set to 150
11/3/2011	10:12:52 AM	Helium valve closed
11/3/2011	10:12:52 AM	H2 valve closed
11/3/2011	10:12:52 AM	BCl3 valve closed
11/3/2011	10:12:52 AM	PH3 valve closed
11/3/2011	10:12:52 AM	SiCl4 pre valve closed
11/3/2011	10:12:52 AM	SiCl4 post valve closed
11/3/2011	10:12:52 AM	Bypass valve closed
11/3/2011	10:12:52 AM	Bubbler valve closed
11/3/2011	10:12:52 AM	Main Vac valve opened
11/3/2011	10:12:52 AM	Helium MFC set to  0.000000
11/3/2011	10:12:52 AM	H2 MFC set to  0.000000
11/3/2011	10:12:52 AM	BCl3 MFC set to  0.000000
11/3/2011	10:12:52 AM	PHl3 MFC set to  0.000000
11/3/2011	10:12:52 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:12:52 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:12:53 AM	Tube furnace set to 150
11/3/2011	10:13:23 AM	H2 valve closed
11/3/2011	10:13:23 AM	BCl3 valve closed
11/3/2011	10:13:23 AM	PH3 valve closed
11/3/2011	10:13:23 AM	SiCl4 pre valve closed
11/3/2011	10:13:23 AM	SiCl4 post valve closed
11/3/2011	10:13:23 AM	Bypass valve closed
11/3/2011	10:13:23 AM	Bubbler valve closed
11/3/2011	10:13:23 AM	Helium valve opened
11/3/2011	10:13:23 AM	Main Vac valve opened
11/3/2011	10:13:23 AM	Helium MFC set to  20.000000
11/3/2011	10:13:23 AM	H2 MFC set to  0.000000
11/3/2011	10:13:23 AM	BCl3 MFC set to  0.000000
11/3/2011	10:13:23 AM	PHl3 MFC set to  0.000000
11/3/2011	10:13:23 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:13:23 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:13:23 AM	Tube furnace set to 150
11/3/2011	10:13:53 AM	Helium valve closed
11/3/2011	10:13:53 AM	H2 valve closed
11/3/2011	10:13:53 AM	BCl3 valve closed
11/3/2011	10:13:53 AM	PH3 valve closed
11/3/2011	10:13:53 AM	SiCl4 pre valve closed
11/3/2011	10:13:53 AM	SiCl4 post valve closed
11/3/2011	10:13:53 AM	Bypass valve closed
11/3/2011	10:13:53 AM	Bubbler valve closed
11/3/2011	10:13:53 AM	Main Vac valve opened
11/3/2011	10:13:53 AM	Helium MFC set to  0.000000
11/3/2011	10:13:53 AM	H2 MFC set to  0.000000
11/3/2011	10:13:53 AM	BCl3 MFC set to  0.000000
11/3/2011	10:13:53 AM	PHl3 MFC set to  0.000000
11/3/2011	10:13:53 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:13:53 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:13:53 AM	Tube furnace set to 150
11/3/2011	10:14:23 AM	H2 valve closed
11/3/2011	10:14:23 AM	BCl3 valve closed
11/3/2011	10:14:23 AM	PH3 valve closed
11/3/2011	10:14:23 AM	SiCl4 pre valve closed
11/3/2011	10:14:23 AM	SiCl4 post valve closed
11/3/2011	10:14:23 AM	Bypass valve closed
11/3/2011	10:14:23 AM	Bubbler valve closed
11/3/2011	10:14:23 AM	Helium valve opened
11/3/2011	10:14:23 AM	Main Vac valve opened
11/3/2011	10:14:23 AM	Helium MFC set to  20.000000
11/3/2011	10:14:23 AM	H2 MFC set to  0.000000
11/3/2011	10:14:23 AM	BCl3 MFC set to  0.000000
11/3/2011	10:14:23 AM	PHl3 MFC set to  0.000000
11/3/2011	10:14:23 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:14:23 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:14:23 AM	Tube furnace set to 150
11/3/2011	10:14:53 AM	Helium valve closed
11/3/2011	10:14:53 AM	H2 valve closed
11/3/2011	10:14:53 AM	BCl3 valve closed
11/3/2011	10:14:53 AM	PH3 valve closed
11/3/2011	10:14:53 AM	SiCl4 pre valve closed
11/3/2011	10:14:53 AM	SiCl4 post valve closed
11/3/2011	10:14:53 AM	Bypass valve closed
11/3/2011	10:14:53 AM	Bubbler valve closed
11/3/2011	10:14:53 AM	Main Vac valve opened
11/3/2011	10:14:53 AM	Helium MFC set to  0.000000
11/3/2011	10:14:53 AM	H2 MFC set to  0.000000
11/3/2011	10:14:53 AM	BCl3 MFC set to  0.000000
11/3/2011	10:14:53 AM	PHl3 MFC set to  0.000000
11/3/2011	10:14:53 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:14:53 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:14:53 AM	Tube furnace set to 150
11/3/2011	10:15:23 AM	H2 valve closed
11/3/2011	10:15:23 AM	BCl3 valve closed
11/3/2011	10:15:23 AM	PH3 valve closed
11/3/2011	10:15:23 AM	SiCl4 pre valve closed
11/3/2011	10:15:23 AM	SiCl4 post valve closed
11/3/2011	10:15:23 AM	Bypass valve closed
11/3/2011	10:15:23 AM	Bubbler valve closed
11/3/2011	10:15:23 AM	Helium valve opened
11/3/2011	10:15:23 AM	Main Vac valve opened
11/3/2011	10:15:23 AM	Helium MFC set to  20.000000
11/3/2011	10:15:23 AM	H2 MFC set to  0.000000
11/3/2011	10:15:23 AM	BCl3 MFC set to  0.000000
11/3/2011	10:15:23 AM	PHl3 MFC set to  0.000000
11/3/2011	10:15:23 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:15:23 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:15:24 AM	Tube furnace set to 150
11/3/2011	10:15:54 AM	Helium valve closed
11/3/2011	10:15:54 AM	H2 valve closed
11/3/2011	10:15:54 AM	BCl3 valve closed
11/3/2011	10:15:54 AM	PH3 valve closed
11/3/2011	10:15:54 AM	SiCl4 pre valve closed
11/3/2011	10:15:54 AM	SiCl4 post valve closed
11/3/2011	10:15:54 AM	Bypass valve closed
11/3/2011	10:15:54 AM	Bubbler valve closed
11/3/2011	10:15:54 AM	Main Vac valve opened
11/3/2011	10:15:54 AM	Helium MFC set to  0.000000
11/3/2011	10:15:54 AM	H2 MFC set to  0.000000
11/3/2011	10:15:54 AM	BCl3 MFC set to  0.000000
11/3/2011	10:15:54 AM	PHl3 MFC set to  0.000000
11/3/2011	10:15:54 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:15:54 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:15:54 AM	Tube furnace set to 150
11/3/2011	10:16:24 AM	H2 valve closed
11/3/2011	10:16:24 AM	BCl3 valve closed
11/3/2011	10:16:24 AM	PH3 valve closed
11/3/2011	10:16:24 AM	SiCl4 pre valve closed
11/3/2011	10:16:24 AM	SiCl4 post valve closed
11/3/2011	10:16:24 AM	Bypass valve closed
11/3/2011	10:16:24 AM	Bubbler valve closed
11/3/2011	10:16:24 AM	Helium valve opened
11/3/2011	10:16:24 AM	Main Vac valve opened
11/3/2011	10:16:24 AM	Helium MFC set to  20.000000
11/3/2011	10:16:24 AM	H2 MFC set to  0.000000
11/3/2011	10:16:24 AM	BCl3 MFC set to  0.000000
11/3/2011	10:16:24 AM	PHl3 MFC set to  0.000000
11/3/2011	10:16:24 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:16:24 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:16:24 AM	Tube furnace set to 150
11/3/2011	10:16:54 AM	Helium valve closed
11/3/2011	10:16:54 AM	H2 valve closed
11/3/2011	10:16:54 AM	BCl3 valve closed
11/3/2011	10:16:54 AM	PH3 valve closed
11/3/2011	10:16:54 AM	SiCl4 pre valve closed
11/3/2011	10:16:54 AM	SiCl4 post valve closed
11/3/2011	10:16:54 AM	Bypass valve closed
11/3/2011	10:16:54 AM	Bubbler valve closed
11/3/2011	10:16:54 AM	Main Vac valve opened
11/3/2011	10:16:54 AM	Helium MFC set to  0.000000
11/3/2011	10:16:54 AM	H2 MFC set to  0.000000
11/3/2011	10:16:54 AM	BCl3 MFC set to  0.000000
11/3/2011	10:16:54 AM	PHl3 MFC set to  0.000000
11/3/2011	10:16:54 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:16:54 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:16:54 AM	Tube furnace set to 150
11/3/2011	10:17:24 AM	H2 valve closed
11/3/2011	10:17:24 AM	BCl3 valve closed
11/3/2011	10:17:24 AM	PH3 valve closed
11/3/2011	10:17:24 AM	SiCl4 pre valve closed
11/3/2011	10:17:24 AM	SiCl4 post valve closed
11/3/2011	10:17:24 AM	Bypass valve closed
11/3/2011	10:17:24 AM	Bubbler valve closed
11/3/2011	10:17:24 AM	Helium valve opened
11/3/2011	10:17:24 AM	Main Vac valve opened
11/3/2011	10:17:24 AM	Helium MFC set to  20.000000
11/3/2011	10:17:24 AM	H2 MFC set to  0.000000
11/3/2011	10:17:24 AM	BCl3 MFC set to  0.000000
11/3/2011	10:17:24 AM	PHl3 MFC set to  0.000000
11/3/2011	10:17:24 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:17:24 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:17:24 AM	Tube furnace set to 150
11/3/2011	10:17:54 AM	Helium valve closed
11/3/2011	10:17:54 AM	H2 valve closed
11/3/2011	10:17:54 AM	BCl3 valve closed
11/3/2011	10:17:54 AM	PH3 valve closed
11/3/2011	10:17:54 AM	SiCl4 pre valve closed
11/3/2011	10:17:54 AM	SiCl4 post valve closed
11/3/2011	10:17:54 AM	Bypass valve closed
11/3/2011	10:17:54 AM	Bubbler valve closed
11/3/2011	10:17:54 AM	Main Vac valve opened
11/3/2011	10:17:54 AM	Helium MFC set to  0.000000
11/3/2011	10:17:54 AM	H2 MFC set to  0.000000
11/3/2011	10:17:54 AM	BCl3 MFC set to  0.000000
11/3/2011	10:17:54 AM	PHl3 MFC set to  0.000000
11/3/2011	10:17:54 AM	SiCl4 MFC set to  0.000000
11/3/2011	10:17:54 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:17:55 AM	Tube furnace set to 150
11/3/2011	10:17:56 AM	Run finished at 10:17 AM
11/3/2011	10:55:09 AM	Main Vac valve closed
11/3/2011	10:55:32 AM	Main Vac valve opened
11/3/2011	11:02:08 AM	Recipe started at 11:02 AM
11/3/2011	11:02:08 AM	Helium valve closed
11/3/2011	11:02:08 AM	H2 valve closed
11/3/2011	11:02:08 AM	BCl3 valve closed
11/3/2011	11:02:08 AM	PH3 valve closed
11/3/2011	11:02:08 AM	SiCl4 pre valve closed
11/3/2011	11:02:08 AM	SiCl4 post valve closed
11/3/2011	11:02:08 AM	Main Vac valve closed
11/3/2011	11:02:08 AM	Bypass valve closed
11/3/2011	11:02:08 AM	Bubbler valve closed
11/3/2011	11:02:08 AM	Helium MFC set to  0.000000
11/3/2011	11:02:08 AM	H2 MFC set to  0.000000
11/3/2011	11:02:08 AM	BCl3 MFC set to  0.000000
11/3/2011	11:02:08 AM	PHl3 MFC set to  0.000000
11/3/2011	11:02:08 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:02:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:02:08 AM	Tube furnace set to 0
11/3/2011	11:02:11 AM	Helium valve closed
11/3/2011	11:02:11 AM	BCl3 valve closed
11/3/2011	11:02:11 AM	PH3 valve closed
11/3/2011	11:02:11 AM	SiCl4 pre valve closed
11/3/2011	11:02:11 AM	SiCl4 post valve closed
11/3/2011	11:02:11 AM	Main Vac valve closed
11/3/2011	11:02:11 AM	Bypass valve closed
11/3/2011	11:02:11 AM	Bubbler valve closed
11/3/2011	11:02:11 AM	H2 valve opened
11/3/2011	11:02:11 AM	Helium MFC set to  0.000000
11/3/2011	11:02:11 AM	H2 MFC set to  500.000000
11/3/2011	11:02:11 AM	BCl3 MFC set to  0.000000
11/3/2011	11:02:11 AM	PHl3 MFC set to  0.000000
11/3/2011	11:02:11 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:02:11 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:02:11 AM	Tube furnace set to 0
11/3/2011	11:03:15 AM	Helium valve closed
11/3/2011	11:03:15 AM	BCl3 valve closed
11/3/2011	11:03:15 AM	PH3 valve closed
11/3/2011	11:03:15 AM	SiCl4 pre valve closed
11/3/2011	11:03:15 AM	SiCl4 post valve closed
11/3/2011	11:03:15 AM	Main Vac valve closed
11/3/2011	11:03:15 AM	Bypass valve closed
11/3/2011	11:03:15 AM	H2 valve opened
11/3/2011	11:03:15 AM	Bubbler valve opened
11/3/2011	11:03:15 AM	Helium MFC set to  0.000000
11/3/2011	11:03:15 AM	H2 MFC set to  500.000000
11/3/2011	11:03:15 AM	BCl3 MFC set to  0.000000
11/3/2011	11:03:15 AM	PHl3 MFC set to  0.000000
11/3/2011	11:03:15 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:03:15 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:03:16 AM	Tube furnace set to 0
11/3/2011	11:03:17 AM	Helium valve closed
11/3/2011	11:03:17 AM	BCl3 valve closed
11/3/2011	11:03:17 AM	PH3 valve closed
11/3/2011	11:03:17 AM	SiCl4 pre valve closed
11/3/2011	11:03:17 AM	SiCl4 post valve closed
11/3/2011	11:03:17 AM	Main Vac valve closed
11/3/2011	11:03:17 AM	Bypass valve closed
11/3/2011	11:03:17 AM	H2 valve opened
11/3/2011	11:03:17 AM	Bubbler valve opened
11/3/2011	11:03:17 AM	Helium MFC set to  0.000000
11/3/2011	11:03:17 AM	H2 MFC set to  500.000000
11/3/2011	11:03:17 AM	BCl3 MFC set to  0.000000
11/3/2011	11:03:17 AM	PHl3 MFC set to  0.000000
11/3/2011	11:03:17 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:03:17 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:03:17 AM	Tube furnace set to 1020
11/3/2011	11:25:17 AM	Helium valve closed
11/3/2011	11:25:17 AM	PH3 valve closed
11/3/2011	11:25:17 AM	Main Vac valve closed
11/3/2011	11:25:17 AM	Bypass valve closed
11/3/2011	11:25:17 AM	H2 valve opened
11/3/2011	11:25:17 AM	BCl3 valve opened
11/3/2011	11:25:17 AM	SiCl4 pre valve opened
11/3/2011	11:25:17 AM	SiCl4 post valve opened
11/3/2011	11:25:17 AM	Bubbler valve opened
11/3/2011	11:25:17 AM	Helium MFC set to  0.000000
11/3/2011	11:25:17 AM	H2 MFC set to  500.000000
11/3/2011	11:25:17 AM	BCl3 MFC set to  2.000000
11/3/2011	11:25:17 AM	PHl3 MFC set to  0.000000
11/3/2011	11:25:17 AM	SiCl4 MFC set to  50.000000
11/3/2011	11:25:17 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:25:17 AM	Tube furnace set to 1020
11/3/2011	11:35:17 AM	Helium valve closed
11/3/2011	11:35:17 AM	BCl3 valve closed
11/3/2011	11:35:17 AM	PH3 valve closed
11/3/2011	11:35:17 AM	SiCl4 pre valve closed
11/3/2011	11:35:17 AM	SiCl4 post valve closed
11/3/2011	11:35:17 AM	Main Vac valve closed
11/3/2011	11:35:17 AM	Bypass valve closed
11/3/2011	11:35:17 AM	H2 valve opened
11/3/2011	11:35:17 AM	Bubbler valve opened
11/3/2011	11:35:17 AM	Helium MFC set to  0.000000
11/3/2011	11:35:17 AM	H2 MFC set to  400.000000
11/3/2011	11:35:17 AM	BCl3 MFC set to  0.000000
11/3/2011	11:35:17 AM	PHl3 MFC set to  0.000000
11/3/2011	11:35:17 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:35:17 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:35:17 AM	Tube furnace set to 750
11/3/2011	11:42:47 AM	H2 valve closed
11/3/2011	11:42:47 AM	BCl3 valve closed
11/3/2011	11:42:47 AM	PH3 valve closed
11/3/2011	11:42:47 AM	SiCl4 pre valve closed
11/3/2011	11:42:47 AM	SiCl4 post valve closed
11/3/2011	11:42:47 AM	Main Vac valve closed
11/3/2011	11:42:47 AM	Bypass valve closed
11/3/2011	11:42:47 AM	Helium valve opened
11/3/2011	11:42:47 AM	Bubbler valve opened
11/3/2011	11:42:47 AM	Helium MFC set to  400.000000
11/3/2011	11:42:47 AM	H2 MFC set to  0.000000
11/3/2011	11:42:47 AM	BCl3 MFC set to  0.000000
11/3/2011	11:42:47 AM	PHl3 MFC set to  0.000000
11/3/2011	11:42:47 AM	SiCl4 MFC set to  0.000000
11/3/2011	11:42:47 AM	Bypass solenoid MFC set to  0.000000
11/3/2011	11:42:47 AM	Tube furnace set to 0
11/3/2011	12:02:47 PM	Helium valve closed
11/3/2011	12:02:47 PM	H2 valve closed
11/3/2011	12:02:47 PM	BCl3 valve closed
11/3/2011	12:02:47 PM	PH3 valve closed
11/3/2011	12:02:47 PM	SiCl4 pre valve closed
11/3/2011	12:02:47 PM	SiCl4 post valve closed
11/3/2011	12:02:47 PM	Main Vac valve closed
11/3/2011	12:02:47 PM	Bypass valve closed
11/3/2011	12:02:47 PM	Bubbler valve closed
11/3/2011	12:02:47 PM	Helium MFC set to  0.000000
11/3/2011	12:02:47 PM	H2 MFC set to  0.000000
11/3/2011	12:02:47 PM	BCl3 MFC set to  0.000000
11/3/2011	12:02:47 PM	PHl3 MFC set to  0.000000
11/3/2011	12:02:47 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:02:47 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:02:47 PM	Tube furnace set to 0
11/3/2011	12:02:48 PM	Run finished at 12:02 PM
11/3/2011	12:46:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	12:46:55 PM	Recipe started at 12:46 PM
11/3/2011	12:46:55 PM	Helium valve closed
11/3/2011	12:46:55 PM	H2 valve closed
11/3/2011	12:46:55 PM	BCl3 valve closed
11/3/2011	12:46:55 PM	PH3 valve closed
11/3/2011	12:46:55 PM	SiCl4 pre valve closed
11/3/2011	12:46:55 PM	SiCl4 post valve closed
11/3/2011	12:46:55 PM	Main Vac valve closed
11/3/2011	12:46:55 PM	Bypass valve closed
11/3/2011	12:46:55 PM	Bubbler valve closed
11/3/2011	12:46:55 PM	Helium MFC set to  0.000000
11/3/2011	12:46:55 PM	H2 MFC set to  0.000000
11/3/2011	12:46:55 PM	BCl3 MFC set to  0.000000
11/3/2011	12:46:55 PM	PHl3 MFC set to  0.000000
11/3/2011	12:46:55 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:46:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:46:56 PM	Tube furnace set to 0
11/3/2011	12:46:59 PM	H2 valve closed
11/3/2011	12:46:59 PM	BCl3 valve closed
11/3/2011	12:46:59 PM	PH3 valve closed
11/3/2011	12:46:59 PM	SiCl4 pre valve closed
11/3/2011	12:46:59 PM	SiCl4 post valve closed
11/3/2011	12:46:59 PM	Main Vac valve closed
11/3/2011	12:46:59 PM	Bypass valve closed
11/3/2011	12:46:59 PM	Bubbler valve closed
11/3/2011	12:46:59 PM	Helium valve opened
11/3/2011	12:46:59 PM	Helium MFC set to  500.000000
11/3/2011	12:46:59 PM	H2 MFC set to  0.000000
11/3/2011	12:46:59 PM	BCl3 MFC set to  0.000000
11/3/2011	12:46:59 PM	PHl3 MFC set to  0.000000
11/3/2011	12:46:59 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:46:59 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:46:59 PM	Tube furnace set to 0
11/3/2011	12:47:07 PM	Helium valve closed
11/3/2011	12:47:07 PM	H2 valve closed
11/3/2011	12:47:07 PM	BCl3 valve closed
11/3/2011	12:47:07 PM	PH3 valve closed
11/3/2011	12:47:07 PM	SiCl4 pre valve closed
11/3/2011	12:47:07 PM	SiCl4 post valve closed
11/3/2011	12:47:07 PM	Main Vac valve closed
11/3/2011	12:47:07 PM	Bypass valve closed
11/3/2011	12:47:07 PM	Bubbler valve closed
11/3/2011	12:47:07 PM	Helium MFC set to  0.000000
11/3/2011	12:47:07 PM	H2 MFC set to  0.000000
11/3/2011	12:47:07 PM	BCl3 MFC set to  0.000000
11/3/2011	12:47:07 PM	PHl3 MFC set to  0.000000
11/3/2011	12:47:07 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:47:07 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:47:07 PM	Tube furnace set to 0
11/3/2011	12:47:08 PM	Run finished at 12:47 PM
11/3/2011	12:47:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	12:48:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	12:48:35 PM	Recipe started at 12:48 PM
11/3/2011	12:48:35 PM	Helium valve closed
11/3/2011	12:48:35 PM	H2 valve closed
11/3/2011	12:48:35 PM	BCl3 valve closed
11/3/2011	12:48:35 PM	PH3 valve closed
11/3/2011	12:48:35 PM	SiCl4 pre valve closed
11/3/2011	12:48:35 PM	SiCl4 post valve closed
11/3/2011	12:48:35 PM	Main Vac valve closed
11/3/2011	12:48:35 PM	Bubbler valve closed
11/3/2011	12:48:35 PM	Bypass valve opened
11/3/2011	12:48:35 PM	Helium MFC set to  0.000000
11/3/2011	12:48:35 PM	H2 MFC set to  0.000000
11/3/2011	12:48:35 PM	BCl3 MFC set to  0.000000
11/3/2011	12:48:35 PM	PHl3 MFC set to  0.000000
11/3/2011	12:48:35 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:48:35 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:48:35 PM	Tube furnace set to 0
11/3/2011	12:49:36 PM	Helium valve closed
11/3/2011	12:49:36 PM	H2 valve closed
11/3/2011	12:49:36 PM	BCl3 valve closed
11/3/2011	12:49:36 PM	PH3 valve closed
11/3/2011	12:49:36 PM	SiCl4 pre valve closed
11/3/2011	12:49:36 PM	SiCl4 post valve closed
11/3/2011	12:49:36 PM	Main Vac valve closed
11/3/2011	12:49:36 PM	Bubbler valve closed
11/3/2011	12:49:36 PM	Bypass valve opened
11/3/2011	12:49:36 PM	Helium MFC set to  0.000000
11/3/2011	12:49:36 PM	H2 MFC set to  0.000000
11/3/2011	12:49:36 PM	BCl3 MFC set to  0.000000
11/3/2011	12:49:36 PM	PHl3 MFC set to  0.000000
11/3/2011	12:49:36 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:49:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:49:36 PM	Tube furnace set to 0
11/3/2011	12:50:36 PM	Helium valve closed
11/3/2011	12:50:36 PM	H2 valve closed
11/3/2011	12:50:36 PM	BCl3 valve closed
11/3/2011	12:50:36 PM	PH3 valve closed
11/3/2011	12:50:36 PM	SiCl4 pre valve closed
11/3/2011	12:50:36 PM	SiCl4 post valve closed
11/3/2011	12:50:36 PM	Bypass valve closed
11/3/2011	12:50:36 PM	Bubbler valve closed
11/3/2011	12:50:36 PM	Main Vac valve opened
11/3/2011	12:50:36 PM	Helium MFC set to  0.000000
11/3/2011	12:50:36 PM	H2 MFC set to  0.000000
11/3/2011	12:50:36 PM	BCl3 MFC set to  0.000000
11/3/2011	12:50:36 PM	PHl3 MFC set to  0.000000
11/3/2011	12:50:36 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:50:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:50:36 PM	Tube furnace set to 0
11/3/2011	12:50:37 PM	Run finished at 12:50 PM
11/3/2011	12:50:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	12:57:45 PM	Program exited cleanly
11/3/2011	12:59:23 PM	Helium valve closed
11/3/2011	12:59:23 PM	H2 valve closed
11/3/2011	12:59:23 PM	BCl3 valve closed
11/3/2011	12:59:23 PM	PH3 valve closed
11/3/2011	12:59:23 PM	SiCl4 pre valve closed
11/3/2011	12:59:23 PM	SiCl4 post valve closed
11/3/2011	12:59:23 PM	Main Vac valve closed
11/3/2011	12:59:23 PM	Bypass valve closed
11/3/2011	12:59:23 PM	Bubbler valve closed
11/3/2011	12:59:23 PM	Helium MFC set to  0.000000
11/3/2011	12:59:23 PM	H2 MFC set to  0.000000
11/3/2011	12:59:23 PM	BCl3 MFC set to  0.000000
11/3/2011	12:59:23 PM	PHl3 MFC set to  0.000000
11/3/2011	12:59:23 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:59:23 PM	Bypass solenoid MFC set to  760.000000
11/3/2011	12:59:23 PM	Tube furnace set to 0
11/3/2011	12:59:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	12:59:27 PM	Recipe started at 12:59 PM
11/3/2011	12:59:27 PM	Helium valve closed
11/3/2011	12:59:27 PM	H2 valve closed
11/3/2011	12:59:27 PM	BCl3 valve closed
11/3/2011	12:59:27 PM	PH3 valve closed
11/3/2011	12:59:27 PM	SiCl4 pre valve closed
11/3/2011	12:59:27 PM	SiCl4 post valve closed
11/3/2011	12:59:27 PM	Main Vac valve closed
11/3/2011	12:59:27 PM	Bypass valve closed
11/3/2011	12:59:27 PM	Bubbler valve closed
11/3/2011	12:59:27 PM	Helium MFC set to  0.000000
11/3/2011	12:59:27 PM	H2 MFC set to  0.000000
11/3/2011	12:59:27 PM	BCl3 MFC set to  0.000000
11/3/2011	12:59:28 PM	PHl3 MFC set to  0.000000
11/3/2011	12:59:28 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:59:28 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:59:28 PM	Tube furnace set to 0
11/3/2011	12:59:30 PM	Run aborted at 12:59 PM
11/3/2011	12:59:30 PM	Helium valve closed
11/3/2011	12:59:30 PM	H2 valve closed
11/3/2011	12:59:30 PM	BCl3 valve closed
11/3/2011	12:59:30 PM	PH3 valve closed
11/3/2011	12:59:30 PM	SiCl4 pre valve closed
11/3/2011	12:59:30 PM	SiCl4 post valve closed
11/3/2011	12:59:30 PM	Bypass valve closed
11/3/2011	12:59:30 PM	Main Vac valve closed
11/3/2011	12:59:30 PM	Bubbler valve closed
11/3/2011	12:59:30 PM	Helium MFC set to  0.000000
11/3/2011	12:59:30 PM	H2 MFC set to  0.000000
11/3/2011	12:59:30 PM	BCl3 MFC set to  0.000000
11/3/2011	12:59:30 PM	PHl3 MFC set to  0.000000
11/3/2011	12:59:30 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:59:30 PM	Tube furnace set to 0
11/3/2011	12:59:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	12:59:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	12:59:37 PM	Recipe started at 12:59 PM
11/3/2011	12:59:37 PM	Helium valve closed
11/3/2011	12:59:37 PM	H2 valve closed
11/3/2011	12:59:37 PM	BCl3 valve closed
11/3/2011	12:59:37 PM	PH3 valve closed
11/3/2011	12:59:37 PM	SiCl4 pre valve closed
11/3/2011	12:59:37 PM	SiCl4 post valve closed
11/3/2011	12:59:37 PM	Main Vac valve closed
11/3/2011	12:59:37 PM	Bypass valve closed
11/3/2011	12:59:37 PM	Bubbler valve closed
11/3/2011	12:59:38 PM	Helium MFC set to  0.000000
11/3/2011	12:59:38 PM	H2 MFC set to  0.000000
11/3/2011	12:59:38 PM	BCl3 MFC set to  0.000000
11/3/2011	12:59:38 PM	PHl3 MFC set to  0.000000
11/3/2011	12:59:38 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:59:38 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:59:38 PM	Tube furnace set to 0
11/3/2011	12:59:41 PM	H2 valve closed
11/3/2011	12:59:41 PM	BCl3 valve closed
11/3/2011	12:59:41 PM	PH3 valve closed
11/3/2011	12:59:41 PM	SiCl4 pre valve closed
11/3/2011	12:59:41 PM	SiCl4 post valve closed
11/3/2011	12:59:41 PM	Main Vac valve closed
11/3/2011	12:59:41 PM	Bypass valve closed
11/3/2011	12:59:41 PM	Bubbler valve closed
11/3/2011	12:59:41 PM	Helium valve opened
11/3/2011	12:59:41 PM	Helium MFC set to  500.000000
11/3/2011	12:59:41 PM	H2 MFC set to  0.000000
11/3/2011	12:59:41 PM	BCl3 MFC set to  0.000000
11/3/2011	12:59:41 PM	PHl3 MFC set to  0.000000
11/3/2011	12:59:41 PM	SiCl4 MFC set to  0.000000
11/3/2011	12:59:41 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	12:59:41 PM	Tube furnace set to 0
11/3/2011	1:00:46 PM	Helium valve closed
11/3/2011	1:00:46 PM	H2 valve closed
11/3/2011	1:00:46 PM	BCl3 valve closed
11/3/2011	1:00:46 PM	PH3 valve closed
11/3/2011	1:00:46 PM	SiCl4 pre valve closed
11/3/2011	1:00:46 PM	SiCl4 post valve closed
11/3/2011	1:00:46 PM	Main Vac valve closed
11/3/2011	1:00:46 PM	Bypass valve closed
11/3/2011	1:00:46 PM	Bubbler valve closed
11/3/2011	1:00:46 PM	Helium MFC set to  0.000000
11/3/2011	1:00:46 PM	H2 MFC set to  0.000000
11/3/2011	1:00:46 PM	BCl3 MFC set to  0.000000
11/3/2011	1:00:46 PM	PHl3 MFC set to  0.000000
11/3/2011	1:00:46 PM	SiCl4 MFC set to  0.000000
11/3/2011	1:00:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	1:00:47 PM	Tube furnace set to 0
11/3/2011	1:00:48 PM	Run finished at 1:00 PM
11/3/2011	1:00:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	1:00:55 PM	Program exited cleanly
11/3/2011	1:36:18 PM	Helium valve closed
11/3/2011	1:36:18 PM	H2 valve closed
11/3/2011	1:36:18 PM	BCl3 valve closed
11/3/2011	1:36:18 PM	PH3 valve closed
11/3/2011	1:36:18 PM	SiCl4 pre valve closed
11/3/2011	1:36:18 PM	SiCl4 post valve closed
11/3/2011	1:36:18 PM	Main Vac valve closed
11/3/2011	1:36:18 PM	Bypass valve closed
11/3/2011	1:36:18 PM	Bubbler valve closed
11/3/2011	1:36:18 PM	Helium MFC set to  0.000000
11/3/2011	1:36:18 PM	H2 MFC set to  0.000000
11/3/2011	1:36:18 PM	BCl3 MFC set to  0.000000
11/3/2011	1:36:18 PM	PHl3 MFC set to  0.000000
11/3/2011	1:36:18 PM	SiCl4 MFC set to  0.000000
11/3/2011	1:36:18 PM	Bypass solenoid MFC set to  760.000000
11/3/2011	1:36:18 PM	Tube furnace set to 0
11/3/2011	1:38:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	1:38:13 PM	Recipe started at 1:38 PM
11/3/2011	1:38:13 PM	Helium valve closed
11/3/2011	1:38:13 PM	H2 valve closed
11/3/2011	1:38:13 PM	BCl3 valve closed
11/3/2011	1:38:13 PM	PH3 valve closed
11/3/2011	1:38:13 PM	SiCl4 pre valve closed
11/3/2011	1:38:13 PM	SiCl4 post valve closed
11/3/2011	1:38:13 PM	Main Vac valve closed
11/3/2011	1:38:13 PM	Bubbler valve closed
11/3/2011	1:38:13 PM	Bypass valve opened
11/3/2011	1:38:13 PM	Helium MFC set to  0.000000
11/3/2011	1:38:13 PM	H2 MFC set to  0.000000
11/3/2011	1:38:13 PM	BCl3 MFC set to  0.000000
11/3/2011	1:38:13 PM	PHl3 MFC set to  0.000000
11/3/2011	1:38:13 PM	SiCl4 MFC set to  0.000000
11/3/2011	1:38:13 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	1:38:13 PM	Tube furnace set to 0
11/3/2011	1:39:22 PM	Helium valve closed
11/3/2011	1:39:22 PM	H2 valve closed
11/3/2011	1:39:22 PM	BCl3 valve closed
11/3/2011	1:39:22 PM	PH3 valve closed
11/3/2011	1:39:22 PM	SiCl4 pre valve closed
11/3/2011	1:39:22 PM	SiCl4 post valve closed
11/3/2011	1:39:22 PM	Main Vac valve closed
11/3/2011	1:39:22 PM	Bubbler valve closed
11/3/2011	1:39:22 PM	Bypass valve opened
11/3/2011	1:39:22 PM	Helium MFC set to  0.000000
11/3/2011	1:39:22 PM	H2 MFC set to  0.000000
11/3/2011	1:39:22 PM	BCl3 MFC set to  0.000000
11/3/2011	1:39:22 PM	PHl3 MFC set to  0.000000
11/3/2011	1:39:22 PM	SiCl4 MFC set to  0.000000
11/3/2011	1:39:22 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	1:39:22 PM	Tube furnace set to 0
11/3/2011	1:40:22 PM	Helium valve closed
11/3/2011	1:40:22 PM	H2 valve closed
11/3/2011	1:40:22 PM	BCl3 valve closed
11/3/2011	1:40:22 PM	PH3 valve closed
11/3/2011	1:40:22 PM	SiCl4 pre valve closed
11/3/2011	1:40:22 PM	SiCl4 post valve closed
11/3/2011	1:40:22 PM	Bypass valve closed
11/3/2011	1:40:22 PM	Bubbler valve closed
11/3/2011	1:40:22 PM	Main Vac valve opened
11/3/2011	1:40:22 PM	Helium MFC set to  0.000000
11/3/2011	1:40:22 PM	H2 MFC set to  0.000000
11/3/2011	1:40:22 PM	BCl3 MFC set to  0.000000
11/3/2011	1:40:22 PM	PHl3 MFC set to  0.000000
11/3/2011	1:40:22 PM	SiCl4 MFC set to  0.000000
11/3/2011	1:40:22 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	1:40:23 PM	Tube furnace set to 0
11/3/2011	1:40:24 PM	Run finished at 1:40 PM
11/3/2011	1:40:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	1:40:30 PM	Tube furnace set to 150
11/3/2011	2:20:20 PM	Main Vac valve closed
11/3/2011	2:20:44 PM	Main Vac valve opened
11/3/2011	2:20:51 PM	Helium MFC set to  20.000000
11/3/2011	2:20:51 PM	Helium valve opened
11/3/2011	2:21:31 PM	Helium valve closed
11/3/2011	2:21:36 PM	Helium MFC set to  0.000000
11/3/2011	2:24:40 PM	Helium MFC set to  20.000000
11/3/2011	2:24:41 PM	Helium valve opened
11/3/2011	2:25:08 PM	Helium valve closed
11/3/2011	2:25:11 PM	Helium MFC set to  0.000000
11/3/2011	2:26:28 PM	Recipe started at 2:26 PM
11/3/2011	2:26:28 PM	Helium valve closed
11/3/2011	2:26:28 PM	H2 valve closed
11/3/2011	2:26:28 PM	BCl3 valve closed
11/3/2011	2:26:28 PM	PH3 valve closed
11/3/2011	2:26:28 PM	SiCl4 pre valve closed
11/3/2011	2:26:28 PM	SiCl4 post valve closed
11/3/2011	2:26:28 PM	Main Vac valve closed
11/3/2011	2:26:28 PM	Bypass valve closed
11/3/2011	2:26:28 PM	Bubbler valve closed
11/3/2011	2:26:28 PM	Helium MFC set to  0.000000
11/3/2011	2:26:28 PM	H2 MFC set to  0.000000
11/3/2011	2:26:28 PM	BCl3 MFC set to  0.000000
11/3/2011	2:26:28 PM	PHl3 MFC set to  0.000000
11/3/2011	2:26:28 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:26:28 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:26:29 PM	Tube furnace set to 0
11/3/2011	2:26:32 PM	Helium valve closed
11/3/2011	2:26:32 PM	BCl3 valve closed
11/3/2011	2:26:32 PM	PH3 valve closed
11/3/2011	2:26:32 PM	SiCl4 pre valve closed
11/3/2011	2:26:32 PM	SiCl4 post valve closed
11/3/2011	2:26:32 PM	Main Vac valve closed
11/3/2011	2:26:32 PM	Bypass valve closed
11/3/2011	2:26:32 PM	Bubbler valve closed
11/3/2011	2:26:32 PM	H2 valve opened
11/3/2011	2:26:32 PM	Helium MFC set to  0.000000
11/3/2011	2:26:32 PM	H2 MFC set to  500.000000
11/3/2011	2:26:32 PM	BCl3 MFC set to  0.000000
11/3/2011	2:26:32 PM	PHl3 MFC set to  0.000000
11/3/2011	2:26:32 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:26:32 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:26:32 PM	Tube furnace set to 0
11/3/2011	2:27:36 PM	Helium valve closed
11/3/2011	2:27:36 PM	BCl3 valve closed
11/3/2011	2:27:36 PM	PH3 valve closed
11/3/2011	2:27:36 PM	SiCl4 pre valve closed
11/3/2011	2:27:36 PM	SiCl4 post valve closed
11/3/2011	2:27:36 PM	Main Vac valve closed
11/3/2011	2:27:36 PM	Bypass valve closed
11/3/2011	2:27:36 PM	H2 valve opened
11/3/2011	2:27:36 PM	Bubbler valve opened
11/3/2011	2:27:36 PM	Helium MFC set to  0.000000
11/3/2011	2:27:36 PM	H2 MFC set to  500.000000
11/3/2011	2:27:36 PM	BCl3 MFC set to  0.000000
11/3/2011	2:27:36 PM	PHl3 MFC set to  0.000000
11/3/2011	2:27:36 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:27:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:27:36 PM	Tube furnace set to 0
11/3/2011	2:27:37 PM	Helium valve closed
11/3/2011	2:27:37 PM	BCl3 valve closed
11/3/2011	2:27:37 PM	PH3 valve closed
11/3/2011	2:27:37 PM	SiCl4 pre valve closed
11/3/2011	2:27:37 PM	SiCl4 post valve closed
11/3/2011	2:27:37 PM	Main Vac valve closed
11/3/2011	2:27:37 PM	Bypass valve closed
11/3/2011	2:27:37 PM	H2 valve opened
11/3/2011	2:27:37 PM	Bubbler valve opened
11/3/2011	2:27:37 PM	Helium MFC set to  0.000000
11/3/2011	2:27:37 PM	H2 MFC set to  500.000000
11/3/2011	2:27:37 PM	BCl3 MFC set to  0.000000
11/3/2011	2:27:37 PM	PHl3 MFC set to  0.000000
11/3/2011	2:27:37 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:27:37 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:27:37 PM	Tube furnace set to 1020
11/3/2011	2:46:56 PM	Helium valve closed
11/3/2011	2:46:56 PM	PH3 valve closed
11/3/2011	2:46:56 PM	Main Vac valve closed
11/3/2011	2:46:56 PM	Bypass valve closed
11/3/2011	2:46:56 PM	H2 valve opened
11/3/2011	2:46:56 PM	BCl3 valve opened
11/3/2011	2:46:56 PM	SiCl4 pre valve opened
11/3/2011	2:46:56 PM	SiCl4 post valve opened
11/3/2011	2:46:56 PM	Bubbler valve opened
11/3/2011	2:46:56 PM	Helium MFC set to  0.000000
11/3/2011	2:46:56 PM	H2 MFC set to  500.000000
11/3/2011	2:46:56 PM	BCl3 MFC set to  2.000000
11/3/2011	2:46:56 PM	PHl3 MFC set to  0.000000
11/3/2011	2:46:56 PM	SiCl4 MFC set to  50.000000
11/3/2011	2:46:56 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:46:57 PM	Tube furnace set to 1020
11/3/2011	2:47:57 PM	H2 valve closed
11/3/2011	2:47:57 PM	BCl3 valve closed
11/3/2011	2:47:57 PM	PH3 valve closed
11/3/2011	2:47:57 PM	SiCl4 pre valve closed
11/3/2011	2:47:57 PM	SiCl4 post valve closed
11/3/2011	2:47:57 PM	Main Vac valve closed
11/3/2011	2:47:57 PM	Bypass valve closed
11/3/2011	2:47:57 PM	Helium valve opened
11/3/2011	2:47:57 PM	Bubbler valve opened
11/3/2011	2:47:57 PM	Helium MFC set to  400.000000
11/3/2011	2:47:57 PM	H2 MFC set to  0.000000
11/3/2011	2:47:57 PM	BCl3 MFC set to  0.000000
11/3/2011	2:47:57 PM	PHl3 MFC set to  0.000000
11/3/2011	2:47:57 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:47:57 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:47:57 PM	Tube furnace set to 0
11/3/2011	2:57:08 PM	Helium valve closed
11/3/2011	2:57:08 PM	H2 valve closed
11/3/2011	2:57:08 PM	BCl3 valve closed
11/3/2011	2:57:08 PM	PH3 valve closed
11/3/2011	2:57:08 PM	SiCl4 pre valve closed
11/3/2011	2:57:08 PM	SiCl4 post valve closed
11/3/2011	2:57:08 PM	Main Vac valve closed
11/3/2011	2:57:08 PM	Bypass valve closed
11/3/2011	2:57:08 PM	Bubbler valve closed
11/3/2011	2:57:08 PM	Helium MFC set to  0.000000
11/3/2011	2:57:08 PM	H2 MFC set to  0.000000
11/3/2011	2:57:08 PM	BCl3 MFC set to  0.000000
11/3/2011	2:57:08 PM	PHl3 MFC set to  0.000000
11/3/2011	2:57:08 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:57:08 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:57:08 PM	Tube furnace set to 0
11/3/2011	2:57:09 PM	Run finished at 2:57 PM
11/3/2011	2:57:48 PM	Program exited cleanly
11/3/2011	2:57:51 PM	Helium valve closed
11/3/2011	2:57:51 PM	H2 valve closed
11/3/2011	2:57:51 PM	BCl3 valve closed
11/3/2011	2:57:51 PM	PH3 valve closed
11/3/2011	2:57:51 PM	SiCl4 pre valve closed
11/3/2011	2:57:51 PM	SiCl4 post valve closed
11/3/2011	2:57:51 PM	Main Vac valve closed
11/3/2011	2:57:51 PM	Bypass valve closed
11/3/2011	2:57:51 PM	Bubbler valve closed
11/3/2011	2:57:51 PM	Helium MFC set to  0.000000
11/3/2011	2:57:51 PM	H2 MFC set to  0.000000
11/3/2011	2:57:51 PM	BCl3 MFC set to  0.000000
11/3/2011	2:57:51 PM	PHl3 MFC set to  0.000000
11/3/2011	2:57:51 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:57:51 PM	Bypass solenoid MFC set to  760.000000
11/3/2011	2:57:51 PM	Tube furnace set to 0
11/3/2011	2:57:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	2:57:55 PM	Recipe started at 2:57 PM
11/3/2011	2:57:55 PM	Helium valve closed
11/3/2011	2:57:55 PM	H2 valve closed
11/3/2011	2:57:55 PM	BCl3 valve closed
11/3/2011	2:57:55 PM	PH3 valve closed
11/3/2011	2:57:55 PM	SiCl4 pre valve closed
11/3/2011	2:57:55 PM	SiCl4 post valve closed
11/3/2011	2:57:55 PM	Main Vac valve closed
11/3/2011	2:57:55 PM	Bubbler valve closed
11/3/2011	2:57:55 PM	Bypass valve opened
11/3/2011	2:57:55 PM	Helium MFC set to  0.000000
11/3/2011	2:57:55 PM	H2 MFC set to  0.000000
11/3/2011	2:57:55 PM	BCl3 MFC set to  0.000000
11/3/2011	2:57:55 PM	PHl3 MFC set to  0.000000
11/3/2011	2:57:55 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:57:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:57:55 PM	Tube furnace set to 0
11/3/2011	2:58:44 PM	Helium valve closed
11/3/2011	2:58:44 PM	H2 valve closed
11/3/2011	2:58:44 PM	BCl3 valve closed
11/3/2011	2:58:44 PM	PH3 valve closed
11/3/2011	2:58:44 PM	SiCl4 pre valve closed
11/3/2011	2:58:44 PM	SiCl4 post valve closed
11/3/2011	2:58:44 PM	Main Vac valve closed
11/3/2011	2:58:44 PM	Bubbler valve closed
11/3/2011	2:58:44 PM	Bypass valve opened
11/3/2011	2:58:44 PM	Helium MFC set to  0.000000
11/3/2011	2:58:44 PM	H2 MFC set to  0.000000
11/3/2011	2:58:44 PM	BCl3 MFC set to  0.000000
11/3/2011	2:58:44 PM	PHl3 MFC set to  0.000000
11/3/2011	2:58:44 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:58:44 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:58:44 PM	Tube furnace set to 0
11/3/2011	2:59:44 PM	Helium valve closed
11/3/2011	2:59:44 PM	H2 valve closed
11/3/2011	2:59:44 PM	BCl3 valve closed
11/3/2011	2:59:44 PM	PH3 valve closed
11/3/2011	2:59:44 PM	SiCl4 pre valve closed
11/3/2011	2:59:44 PM	SiCl4 post valve closed
11/3/2011	2:59:44 PM	Bypass valve closed
11/3/2011	2:59:45 PM	Bubbler valve closed
11/3/2011	2:59:45 PM	Main Vac valve opened
11/3/2011	2:59:45 PM	Helium MFC set to  0.000000
11/3/2011	2:59:45 PM	H2 MFC set to  0.000000
11/3/2011	2:59:45 PM	BCl3 MFC set to  0.000000
11/3/2011	2:59:45 PM	PHl3 MFC set to  0.000000
11/3/2011	2:59:45 PM	SiCl4 MFC set to  0.000000
11/3/2011	2:59:45 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	2:59:45 PM	Tube furnace set to 0
11/3/2011	2:59:46 PM	Run finished at 2:59 PM
11/3/2011	2:59:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	3:12:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	3:12:36 PM	Recipe started at 3:12 PM
11/3/2011	3:12:36 PM	Helium valve closed
11/3/2011	3:12:36 PM	H2 valve closed
11/3/2011	3:12:36 PM	BCl3 valve closed
11/3/2011	3:12:36 PM	PH3 valve closed
11/3/2011	3:12:36 PM	SiCl4 pre valve closed
11/3/2011	3:12:36 PM	SiCl4 post valve closed
11/3/2011	3:12:36 PM	Main Vac valve closed
11/3/2011	3:12:36 PM	Bypass valve closed
11/3/2011	3:12:36 PM	Bubbler valve closed
11/3/2011	3:12:36 PM	Helium MFC set to  0.000000
11/3/2011	3:12:36 PM	H2 MFC set to  0.000000
11/3/2011	3:12:36 PM	BCl3 MFC set to  0.000000
11/3/2011	3:12:36 PM	PHl3 MFC set to  0.000000
11/3/2011	3:12:36 PM	SiCl4 MFC set to  0.000000
11/3/2011	3:12:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	3:12:36 PM	Tube furnace set to 0
11/3/2011	3:12:39 PM	H2 valve closed
11/3/2011	3:12:39 PM	BCl3 valve closed
11/3/2011	3:12:39 PM	PH3 valve closed
11/3/2011	3:12:39 PM	SiCl4 pre valve closed
11/3/2011	3:12:39 PM	SiCl4 post valve closed
11/3/2011	3:12:39 PM	Main Vac valve closed
11/3/2011	3:12:39 PM	Bypass valve closed
11/3/2011	3:12:39 PM	Bubbler valve closed
11/3/2011	3:12:39 PM	Helium valve opened
11/3/2011	3:12:39 PM	Helium MFC set to  500.000000
11/3/2011	3:12:39 PM	H2 MFC set to  0.000000
11/3/2011	3:12:39 PM	BCl3 MFC set to  0.000000
11/3/2011	3:12:39 PM	PHl3 MFC set to  0.000000
11/3/2011	3:12:39 PM	SiCl4 MFC set to  0.000000
11/3/2011	3:12:39 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	3:12:40 PM	Tube furnace set to 0
11/3/2011	3:13:43 PM	Helium valve closed
11/3/2011	3:13:43 PM	H2 valve closed
11/3/2011	3:13:43 PM	BCl3 valve closed
11/3/2011	3:13:43 PM	PH3 valve closed
11/3/2011	3:13:43 PM	SiCl4 pre valve closed
11/3/2011	3:13:43 PM	SiCl4 post valve closed
11/3/2011	3:13:43 PM	Main Vac valve closed
11/3/2011	3:13:43 PM	Bypass valve closed
11/3/2011	3:13:43 PM	Bubbler valve closed
11/3/2011	3:13:43 PM	Helium MFC set to  0.000000
11/3/2011	3:13:43 PM	H2 MFC set to  0.000000
11/3/2011	3:13:43 PM	BCl3 MFC set to  0.000000
11/3/2011	3:13:43 PM	PHl3 MFC set to  0.000000
11/3/2011	3:13:43 PM	SiCl4 MFC set to  0.000000
11/3/2011	3:13:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	3:13:43 PM	Tube furnace set to 0
11/3/2011	3:13:44 PM	Run finished at 3:13 PM
11/3/2011	3:13:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	3:15:30 PM	Program exited cleanly
11/3/2011	4:03:32 PM	Helium valve closed
11/3/2011	4:03:32 PM	H2 valve closed
11/3/2011	4:03:32 PM	BCl3 valve closed
11/3/2011	4:03:32 PM	PH3 valve closed
11/3/2011	4:03:32 PM	SiCl4 pre valve closed
11/3/2011	4:03:32 PM	SiCl4 post valve closed
11/3/2011	4:03:32 PM	Main Vac valve closed
11/3/2011	4:03:32 PM	Bypass valve closed
11/3/2011	4:03:32 PM	Bubbler valve closed
11/3/2011	4:03:32 PM	Helium MFC set to  0.000000
11/3/2011	4:03:32 PM	H2 MFC set to  0.000000
11/3/2011	4:03:32 PM	BCl3 MFC set to  0.000000
11/3/2011	4:03:32 PM	PHl3 MFC set to  0.000000
11/3/2011	4:03:32 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:03:32 PM	Bypass solenoid MFC set to  760.000000
11/3/2011	4:03:38 PM	Error in setting the tube furnace  to 0
11/3/2011	4:03:57 PM	Helium valve closed
11/3/2011	4:03:57 PM	H2 valve closed
11/3/2011	4:03:57 PM	BCl3 valve closed
11/3/2011	4:03:57 PM	PH3 valve closed
11/3/2011	4:03:57 PM	SiCl4 pre valve closed
11/3/2011	4:03:57 PM	SiCl4 post valve closed
11/3/2011	4:03:57 PM	Main Vac valve closed
11/3/2011	4:03:57 PM	Bypass valve closed
11/3/2011	4:03:57 PM	Bubbler valve closed
11/3/2011	4:03:57 PM	Helium MFC set to  0.000000
11/3/2011	4:03:57 PM	H2 MFC set to  0.000000
11/3/2011	4:03:57 PM	BCl3 MFC set to  0.000000
11/3/2011	4:03:57 PM	PHl3 MFC set to  0.000000
11/3/2011	4:03:57 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:03:57 PM	Bypass solenoid MFC set to  760.000000
11/3/2011	4:03:57 PM	Tube furnace set to 0
11/3/2011	4:04:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	4:04:52 PM	Recipe started at 4:04 PM
11/3/2011	4:04:52 PM	Helium valve closed
11/3/2011	4:04:52 PM	H2 valve closed
11/3/2011	4:04:52 PM	BCl3 valve closed
11/3/2011	4:04:52 PM	PH3 valve closed
11/3/2011	4:04:52 PM	SiCl4 pre valve closed
11/3/2011	4:04:52 PM	SiCl4 post valve closed
11/3/2011	4:04:52 PM	Main Vac valve closed
11/3/2011	4:04:52 PM	Bubbler valve closed
11/3/2011	4:04:52 PM	Bypass valve opened
11/3/2011	4:04:52 PM	Helium MFC set to  0.000000
11/3/2011	4:04:52 PM	H2 MFC set to  0.000000
11/3/2011	4:04:52 PM	BCl3 MFC set to  0.000000
11/3/2011	4:04:52 PM	PHl3 MFC set to  0.000000
11/3/2011	4:04:52 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:04:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:04:52 PM	Tube furnace set to 0
11/3/2011	4:06:03 PM	Helium valve closed
11/3/2011	4:06:03 PM	H2 valve closed
11/3/2011	4:06:03 PM	BCl3 valve closed
11/3/2011	4:06:03 PM	PH3 valve closed
11/3/2011	4:06:03 PM	SiCl4 pre valve closed
11/3/2011	4:06:03 PM	SiCl4 post valve closed
11/3/2011	4:06:03 PM	Main Vac valve closed
11/3/2011	4:06:03 PM	Bubbler valve closed
11/3/2011	4:06:03 PM	Bypass valve opened
11/3/2011	4:06:03 PM	Helium MFC set to  0.000000
11/3/2011	4:06:03 PM	H2 MFC set to  0.000000
11/3/2011	4:06:03 PM	BCl3 MFC set to  0.000000
11/3/2011	4:06:03 PM	PHl3 MFC set to  0.000000
11/3/2011	4:06:03 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:06:03 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:06:03 PM	Tube furnace set to 0
11/3/2011	4:07:03 PM	Helium valve closed
11/3/2011	4:07:03 PM	H2 valve closed
11/3/2011	4:07:03 PM	BCl3 valve closed
11/3/2011	4:07:03 PM	PH3 valve closed
11/3/2011	4:07:03 PM	SiCl4 pre valve closed
11/3/2011	4:07:03 PM	SiCl4 post valve closed
11/3/2011	4:07:03 PM	Bypass valve closed
11/3/2011	4:07:03 PM	Bubbler valve closed
11/3/2011	4:07:03 PM	Main Vac valve opened
11/3/2011	4:07:03 PM	Helium MFC set to  0.000000
11/3/2011	4:07:03 PM	H2 MFC set to  0.000000
11/3/2011	4:07:03 PM	BCl3 MFC set to  0.000000
11/3/2011	4:07:03 PM	PHl3 MFC set to  0.000000
11/3/2011	4:07:03 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:07:03 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:07:03 PM	Tube furnace set to 0
11/3/2011	4:07:04 PM	Run finished at 4:07 PM
11/3/2011	4:07:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	4:07:48 PM	Tube furnace set to 100
11/3/2011	4:32:07 PM	Helium MFC set to  20.000000
11/3/2011	4:32:12 PM	Helium valve opened
11/3/2011	4:33:33 PM	Helium valve closed
11/3/2011	4:34:12 PM	Tube furnace set to 150
11/3/2011	4:34:32 PM	Main Vac valve closed
11/3/2011	4:34:43 PM	Main Vac valve opened
11/3/2011	4:35:06 PM	Helium valve opened
11/3/2011	4:35:41 PM	Helium valve closed
11/3/2011	4:44:43 PM	Helium valve opened
11/3/2011	4:46:04 PM	Helium valve closed
11/3/2011	4:47:31 PM	Main Vac valve closed
11/3/2011	4:47:54 PM	Main Vac valve opened
11/3/2011	4:49:51 PM	Helium valve opened
11/3/2011	4:50:25 PM	Helium valve closed
11/3/2011	4:50:31 PM	Helium MFC set to  0.000000
11/3/2011	4:54:44 PM	Recipe started at 4:54 PM
11/3/2011	4:54:44 PM	Helium valve closed
11/3/2011	4:54:44 PM	H2 valve closed
11/3/2011	4:54:44 PM	BCl3 valve closed
11/3/2011	4:54:44 PM	PH3 valve closed
11/3/2011	4:54:44 PM	SiCl4 pre valve closed
11/3/2011	4:54:44 PM	SiCl4 post valve closed
11/3/2011	4:54:44 PM	Main Vac valve closed
11/3/2011	4:54:44 PM	Bypass valve closed
11/3/2011	4:54:44 PM	Bubbler valve closed
11/3/2011	4:54:44 PM	Helium MFC set to  0.000000
11/3/2011	4:54:44 PM	H2 MFC set to  0.000000
11/3/2011	4:54:44 PM	BCl3 MFC set to  0.000000
11/3/2011	4:54:44 PM	PHl3 MFC set to  0.000000
11/3/2011	4:54:44 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:54:44 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:54:44 PM	Tube furnace set to 0
11/3/2011	4:54:47 PM	Helium valve closed
11/3/2011	4:54:47 PM	BCl3 valve closed
11/3/2011	4:54:47 PM	PH3 valve closed
11/3/2011	4:54:47 PM	SiCl4 pre valve closed
11/3/2011	4:54:47 PM	SiCl4 post valve closed
11/3/2011	4:54:47 PM	Main Vac valve closed
11/3/2011	4:54:47 PM	Bypass valve closed
11/3/2011	4:54:47 PM	Bubbler valve closed
11/3/2011	4:54:47 PM	H2 valve opened
11/3/2011	4:54:47 PM	Helium MFC set to  0.000000
11/3/2011	4:54:47 PM	H2 MFC set to  500.000000
11/3/2011	4:54:47 PM	BCl3 MFC set to  0.000000
11/3/2011	4:54:47 PM	PHl3 MFC set to  0.000000
11/3/2011	4:54:47 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:54:47 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:54:47 PM	Tube furnace set to 0
11/3/2011	4:55:51 PM	Helium valve closed
11/3/2011	4:55:51 PM	BCl3 valve closed
11/3/2011	4:55:51 PM	PH3 valve closed
11/3/2011	4:55:51 PM	SiCl4 pre valve closed
11/3/2011	4:55:51 PM	SiCl4 post valve closed
11/3/2011	4:55:51 PM	Main Vac valve closed
11/3/2011	4:55:51 PM	Bypass valve closed
11/3/2011	4:55:51 PM	H2 valve opened
11/3/2011	4:55:51 PM	Bubbler valve opened
11/3/2011	4:55:51 PM	Helium MFC set to  0.000000
11/3/2011	4:55:51 PM	H2 MFC set to  500.000000
11/3/2011	4:55:51 PM	BCl3 MFC set to  0.000000
11/3/2011	4:55:51 PM	PHl3 MFC set to  0.000000
11/3/2011	4:55:51 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:55:51 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:55:51 PM	Tube furnace set to 0
11/3/2011	4:55:52 PM	Helium valve closed
11/3/2011	4:55:52 PM	BCl3 valve closed
11/3/2011	4:55:52 PM	PH3 valve closed
11/3/2011	4:55:52 PM	SiCl4 pre valve closed
11/3/2011	4:55:52 PM	SiCl4 post valve closed
11/3/2011	4:55:52 PM	Main Vac valve closed
11/3/2011	4:55:52 PM	Bypass valve closed
11/3/2011	4:55:52 PM	H2 valve opened
11/3/2011	4:55:52 PM	Bubbler valve opened
11/3/2011	4:55:52 PM	Helium MFC set to  0.000000
11/3/2011	4:55:52 PM	H2 MFC set to  500.000000
11/3/2011	4:55:52 PM	BCl3 MFC set to  0.000000
11/3/2011	4:55:52 PM	PHl3 MFC set to  0.000000
11/3/2011	4:55:52 PM	SiCl4 MFC set to  0.000000
11/3/2011	4:55:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	4:55:52 PM	Tube furnace set to 1020
11/3/2011	5:17:52 PM	Helium valve closed
11/3/2011	5:17:52 PM	PH3 valve closed
11/3/2011	5:17:52 PM	Main Vac valve closed
11/3/2011	5:17:52 PM	Bypass valve closed
11/3/2011	5:17:52 PM	H2 valve opened
11/3/2011	5:17:52 PM	BCl3 valve opened
11/3/2011	5:17:52 PM	SiCl4 pre valve opened
11/3/2011	5:17:52 PM	SiCl4 post valve opened
11/3/2011	5:17:52 PM	Bubbler valve opened
11/3/2011	5:17:52 PM	Helium MFC set to  0.000000
11/3/2011	5:17:52 PM	H2 MFC set to  500.000000
11/3/2011	5:17:52 PM	BCl3 MFC set to  2.000000
11/3/2011	5:17:52 PM	PHl3 MFC set to  0.000000
11/3/2011	5:17:52 PM	SiCl4 MFC set to  50.000000
11/3/2011	5:17:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	5:17:53 PM	Tube furnace set to 1020
11/3/2011	5:27:53 PM	Helium valve closed
11/3/2011	5:27:53 PM	BCl3 valve closed
11/3/2011	5:27:53 PM	PH3 valve closed
11/3/2011	5:27:53 PM	SiCl4 pre valve closed
11/3/2011	5:27:53 PM	SiCl4 post valve closed
11/3/2011	5:27:53 PM	Main Vac valve closed
11/3/2011	5:27:53 PM	Bypass valve closed
11/3/2011	5:27:53 PM	H2 valve opened
11/3/2011	5:27:53 PM	Bubbler valve opened
11/3/2011	5:27:53 PM	Helium MFC set to  0.000000
11/3/2011	5:27:53 PM	H2 MFC set to  400.000000
11/3/2011	5:27:53 PM	BCl3 MFC set to  0.000000
11/3/2011	5:27:53 PM	PHl3 MFC set to  0.000000
11/3/2011	5:27:53 PM	SiCl4 MFC set to  0.000000
11/3/2011	5:27:53 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	5:27:53 PM	Tube furnace set to 750
11/3/2011	5:35:23 PM	H2 valve closed
11/3/2011	5:35:23 PM	BCl3 valve closed
11/3/2011	5:35:23 PM	PH3 valve closed
11/3/2011	5:35:23 PM	SiCl4 pre valve closed
11/3/2011	5:35:23 PM	SiCl4 post valve closed
11/3/2011	5:35:23 PM	Main Vac valve closed
11/3/2011	5:35:23 PM	Bypass valve closed
11/3/2011	5:35:23 PM	Helium valve opened
11/3/2011	5:35:23 PM	Bubbler valve opened
11/3/2011	5:35:23 PM	Helium MFC set to  400.000000
11/3/2011	5:35:23 PM	H2 MFC set to  0.000000
11/3/2011	5:35:23 PM	BCl3 MFC set to  0.000000
11/3/2011	5:35:23 PM	PHl3 MFC set to  0.000000
11/3/2011	5:35:23 PM	SiCl4 MFC set to  0.000000
11/3/2011	5:35:23 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	5:35:23 PM	Tube furnace set to 0
11/3/2011	5:55:23 PM	Helium valve closed
11/3/2011	5:55:23 PM	H2 valve closed
11/3/2011	5:55:23 PM	BCl3 valve closed
11/3/2011	5:55:23 PM	PH3 valve closed
11/3/2011	5:55:23 PM	SiCl4 pre valve closed
11/3/2011	5:55:23 PM	SiCl4 post valve closed
11/3/2011	5:55:23 PM	Main Vac valve closed
11/3/2011	5:55:23 PM	Bypass valve closed
11/3/2011	5:55:23 PM	Bubbler valve closed
11/3/2011	5:55:23 PM	Helium MFC set to  0.000000
11/3/2011	5:55:23 PM	H2 MFC set to  0.000000
11/3/2011	5:55:23 PM	BCl3 MFC set to  0.000000
11/3/2011	5:55:23 PM	PHl3 MFC set to  0.000000
11/3/2011	5:55:23 PM	SiCl4 MFC set to  0.000000
11/3/2011	5:55:23 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	5:55:23 PM	Tube furnace set to 0
11/3/2011	5:55:24 PM	Run finished at 5:55 PM
11/3/2011	5:59:16 PM	Helium MFC set to  20.000000
11/3/2011	5:59:29 PM	Helium valve opened
11/3/2011	5:59:36 PM	Helium valve closed
11/3/2011	5:59:40 PM	Helium MFC set to  40.000000
11/3/2011	5:59:40 PM	Helium valve opened
11/3/2011	5:59:49 PM	Helium valve closed
11/3/2011	5:59:58 PM	Bypass valve opened
11/3/2011	6:00:03 PM	Bypass valve closed
11/3/2011	6:00:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	6:00:05 PM	Recipe started at 6:00 PM
11/3/2011	6:00:05 PM	Helium valve closed
11/3/2011	6:00:05 PM	H2 valve closed
11/3/2011	6:00:05 PM	BCl3 valve closed
11/3/2011	6:00:05 PM	PH3 valve closed
11/3/2011	6:00:05 PM	SiCl4 pre valve closed
11/3/2011	6:00:05 PM	SiCl4 post valve closed
11/3/2011	6:00:05 PM	Main Vac valve closed
11/3/2011	6:00:05 PM	Bypass valve closed
11/3/2011	6:00:05 PM	Bubbler valve closed
11/3/2011	6:00:05 PM	Helium MFC set to  0.000000
11/3/2011	6:00:05 PM	H2 MFC set to  0.000000
11/3/2011	6:00:05 PM	BCl3 MFC set to  0.000000
11/3/2011	6:00:05 PM	PHl3 MFC set to  0.000000
11/3/2011	6:00:05 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:00:05 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:00:05 PM	Tube furnace set to 0
11/3/2011	6:00:08 PM	H2 valve closed
11/3/2011	6:00:08 PM	BCl3 valve closed
11/3/2011	6:00:08 PM	PH3 valve closed
11/3/2011	6:00:08 PM	SiCl4 pre valve closed
11/3/2011	6:00:08 PM	SiCl4 post valve closed
11/3/2011	6:00:08 PM	Main Vac valve closed
11/3/2011	6:00:08 PM	Bypass valve closed
11/3/2011	6:00:08 PM	Bubbler valve closed
11/3/2011	6:00:08 PM	Helium valve opened
11/3/2011	6:00:08 PM	Helium MFC set to  500.000000
11/3/2011	6:00:08 PM	H2 MFC set to  0.000000
11/3/2011	6:00:08 PM	BCl3 MFC set to  0.000000
11/3/2011	6:00:08 PM	PHl3 MFC set to  0.000000
11/3/2011	6:00:08 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:00:08 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:00:08 PM	Tube furnace set to 0
11/3/2011	6:00:52 PM	Helium valve closed
11/3/2011	6:00:52 PM	H2 valve closed
11/3/2011	6:00:52 PM	BCl3 valve closed
11/3/2011	6:00:52 PM	PH3 valve closed
11/3/2011	6:00:52 PM	SiCl4 pre valve closed
11/3/2011	6:00:52 PM	SiCl4 post valve closed
11/3/2011	6:00:52 PM	Main Vac valve closed
11/3/2011	6:00:52 PM	Bypass valve closed
11/3/2011	6:00:52 PM	Bubbler valve closed
11/3/2011	6:00:52 PM	Helium MFC set to  0.000000
11/3/2011	6:00:52 PM	H2 MFC set to  0.000000
11/3/2011	6:00:52 PM	BCl3 MFC set to  0.000000
11/3/2011	6:00:52 PM	PHl3 MFC set to  0.000000
11/3/2011	6:00:52 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:00:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:00:52 PM	Tube furnace set to 0
11/3/2011	6:00:53 PM	Run finished at 6:00 PM
11/3/2011	6:00:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2011	6:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	6:08:16 PM	Recipe started at 6:08 PM
11/3/2011	6:08:16 PM	Helium valve closed
11/3/2011	6:08:16 PM	H2 valve closed
11/3/2011	6:08:16 PM	BCl3 valve closed
11/3/2011	6:08:16 PM	PH3 valve closed
11/3/2011	6:08:16 PM	SiCl4 pre valve closed
11/3/2011	6:08:16 PM	SiCl4 post valve closed
11/3/2011	6:08:16 PM	Main Vac valve closed
11/3/2011	6:08:16 PM	Bubbler valve closed
11/3/2011	6:08:16 PM	Bypass valve opened
11/3/2011	6:08:16 PM	Helium MFC set to  0.000000
11/3/2011	6:08:16 PM	H2 MFC set to  0.000000
11/3/2011	6:08:16 PM	BCl3 MFC set to  0.000000
11/3/2011	6:08:16 PM	PHl3 MFC set to  0.000000
11/3/2011	6:08:16 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:08:16 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:08:16 PM	Tube furnace set to 0
11/3/2011	6:09:25 PM	Helium valve closed
11/3/2011	6:09:25 PM	H2 valve closed
11/3/2011	6:09:25 PM	BCl3 valve closed
11/3/2011	6:09:25 PM	PH3 valve closed
11/3/2011	6:09:25 PM	SiCl4 pre valve closed
11/3/2011	6:09:25 PM	SiCl4 post valve closed
11/3/2011	6:09:25 PM	Main Vac valve closed
11/3/2011	6:09:25 PM	Bubbler valve closed
11/3/2011	6:09:25 PM	Bypass valve opened
11/3/2011	6:09:25 PM	Helium MFC set to  0.000000
11/3/2011	6:09:25 PM	H2 MFC set to  0.000000
11/3/2011	6:09:25 PM	BCl3 MFC set to  0.000000
11/3/2011	6:09:25 PM	PHl3 MFC set to  0.000000
11/3/2011	6:09:25 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:09:25 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:09:25 PM	Tube furnace set to 0
11/3/2011	6:10:25 PM	Helium valve closed
11/3/2011	6:10:25 PM	H2 valve closed
11/3/2011	6:10:25 PM	BCl3 valve closed
11/3/2011	6:10:25 PM	PH3 valve closed
11/3/2011	6:10:25 PM	SiCl4 pre valve closed
11/3/2011	6:10:25 PM	SiCl4 post valve closed
11/3/2011	6:10:25 PM	Bypass valve closed
11/3/2011	6:10:25 PM	Bubbler valve closed
11/3/2011	6:10:25 PM	Main Vac valve opened
11/3/2011	6:10:25 PM	Helium MFC set to  0.000000
11/3/2011	6:10:25 PM	H2 MFC set to  0.000000
11/3/2011	6:10:25 PM	BCl3 MFC set to  0.000000
11/3/2011	6:10:25 PM	PHl3 MFC set to  0.000000
11/3/2011	6:10:25 PM	SiCl4 MFC set to  0.000000
11/3/2011	6:10:25 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	6:10:25 PM	Tube furnace set to 0
11/3/2011	6:10:26 PM	Run finished at 6:10 PM
11/3/2011	6:10:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	6:16:59 PM	Tube furnace set to 100
11/3/2011	8:45:36 PM	Tube furnace set to 150
11/3/2011	8:46:28 PM	Main Vac valve closed
11/3/2011	8:46:50 PM	Main Vac valve opened
11/3/2011	8:47:27 PM	Recipe started at 8:47 PM
11/3/2011	8:47:27 PM	Helium valve closed
11/3/2011	8:47:27 PM	H2 valve closed
11/3/2011	8:47:27 PM	BCl3 valve closed
11/3/2011	8:47:27 PM	PH3 valve closed
11/3/2011	8:47:27 PM	SiCl4 pre valve closed
11/3/2011	8:47:27 PM	SiCl4 post valve closed
11/3/2011	8:47:27 PM	Main Vac valve closed
11/3/2011	8:47:27 PM	Bypass valve closed
11/3/2011	8:47:27 PM	Bubbler valve closed
11/3/2011	8:47:27 PM	Helium MFC set to  0.000000
11/3/2011	8:47:27 PM	H2 MFC set to  0.000000
11/3/2011	8:47:27 PM	BCl3 MFC set to  0.000000
11/3/2011	8:47:27 PM	PHl3 MFC set to  0.000000
11/3/2011	8:47:27 PM	SiCl4 MFC set to  0.000000
11/3/2011	8:47:27 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	8:47:28 PM	Tube furnace set to 0
11/3/2011	8:47:31 PM	Helium valve closed
11/3/2011	8:47:31 PM	BCl3 valve closed
11/3/2011	8:47:31 PM	PH3 valve closed
11/3/2011	8:47:31 PM	SiCl4 pre valve closed
11/3/2011	8:47:31 PM	SiCl4 post valve closed
11/3/2011	8:47:31 PM	Main Vac valve closed
11/3/2011	8:47:31 PM	Bypass valve closed
11/3/2011	8:47:31 PM	Bubbler valve closed
11/3/2011	8:47:31 PM	H2 valve opened
11/3/2011	8:47:31 PM	Helium MFC set to  0.000000
11/3/2011	8:47:31 PM	H2 MFC set to  500.000000
11/3/2011	8:47:31 PM	BCl3 MFC set to  0.000000
11/3/2011	8:47:31 PM	PHl3 MFC set to  0.000000
11/3/2011	8:47:31 PM	SiCl4 MFC set to  0.000000
11/3/2011	8:47:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	8:47:31 PM	Tube furnace set to 0
11/3/2011	8:48:35 PM	Helium valve closed
11/3/2011	8:48:35 PM	BCl3 valve closed
11/3/2011	8:48:35 PM	PH3 valve closed
11/3/2011	8:48:35 PM	SiCl4 pre valve closed
11/3/2011	8:48:35 PM	SiCl4 post valve closed
11/3/2011	8:48:35 PM	Main Vac valve closed
11/3/2011	8:48:35 PM	Bypass valve closed
11/3/2011	8:48:35 PM	H2 valve opened
11/3/2011	8:48:35 PM	Bubbler valve opened
11/3/2011	8:48:35 PM	Helium MFC set to  0.000000
11/3/2011	8:48:35 PM	H2 MFC set to  500.000000
11/3/2011	8:48:35 PM	BCl3 MFC set to  0.000000
11/3/2011	8:48:35 PM	PHl3 MFC set to  0.000000
11/3/2011	8:48:35 PM	SiCl4 MFC set to  0.000000
11/3/2011	8:48:35 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	8:48:35 PM	Tube furnace set to 0
11/3/2011	8:48:36 PM	Helium valve closed
11/3/2011	8:48:36 PM	BCl3 valve closed
11/3/2011	8:48:36 PM	PH3 valve closed
11/3/2011	8:48:36 PM	SiCl4 pre valve closed
11/3/2011	8:48:36 PM	SiCl4 post valve closed
11/3/2011	8:48:36 PM	Main Vac valve closed
11/3/2011	8:48:36 PM	Bypass valve closed
11/3/2011	8:48:36 PM	H2 valve opened
11/3/2011	8:48:36 PM	Bubbler valve opened
11/3/2011	8:48:36 PM	Helium MFC set to  0.000000
11/3/2011	8:48:36 PM	H2 MFC set to  500.000000
11/3/2011	8:48:36 PM	BCl3 MFC set to  0.000000
11/3/2011	8:48:36 PM	PHl3 MFC set to  0.000000
11/3/2011	8:48:36 PM	SiCl4 MFC set to  0.000000
11/3/2011	8:48:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	8:48:36 PM	Tube furnace set to 1020
11/3/2011	9:10:36 PM	Helium valve closed
11/3/2011	9:10:36 PM	PH3 valve closed
11/3/2011	9:10:36 PM	Main Vac valve closed
11/3/2011	9:10:36 PM	Bypass valve closed
11/3/2011	9:10:36 PM	H2 valve opened
11/3/2011	9:10:36 PM	BCl3 valve opened
11/3/2011	9:10:36 PM	SiCl4 pre valve opened
11/3/2011	9:10:36 PM	SiCl4 post valve opened
11/3/2011	9:10:36 PM	Bubbler valve opened
11/3/2011	9:10:36 PM	Helium MFC set to  0.000000
11/3/2011	9:10:36 PM	H2 MFC set to  500.000000
11/3/2011	9:10:36 PM	BCl3 MFC set to  2.800000
11/3/2011	9:10:36 PM	PHl3 MFC set to  0.000000
11/3/2011	9:10:36 PM	SiCl4 MFC set to  70.000000
11/3/2011	9:10:36 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:10:37 PM	Tube furnace set to 1020
11/3/2011	9:20:37 PM	Helium valve closed
11/3/2011	9:20:37 PM	BCl3 valve closed
11/3/2011	9:20:37 PM	PH3 valve closed
11/3/2011	9:20:37 PM	SiCl4 pre valve closed
11/3/2011	9:20:37 PM	SiCl4 post valve closed
11/3/2011	9:20:37 PM	Main Vac valve closed
11/3/2011	9:20:37 PM	Bypass valve closed
11/3/2011	9:20:37 PM	H2 valve opened
11/3/2011	9:20:37 PM	Bubbler valve opened
11/3/2011	9:20:37 PM	Helium MFC set to  0.000000
11/3/2011	9:20:37 PM	H2 MFC set to  400.000000
11/3/2011	9:20:37 PM	BCl3 MFC set to  0.000000
11/3/2011	9:20:37 PM	PHl3 MFC set to  0.000000
11/3/2011	9:20:37 PM	SiCl4 MFC set to  0.000000
11/3/2011	9:20:37 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:20:37 PM	Tube furnace set to 750
11/3/2011	9:28:07 PM	H2 valve closed
11/3/2011	9:28:07 PM	BCl3 valve closed
11/3/2011	9:28:07 PM	PH3 valve closed
11/3/2011	9:28:07 PM	SiCl4 pre valve closed
11/3/2011	9:28:07 PM	SiCl4 post valve closed
11/3/2011	9:28:07 PM	Main Vac valve closed
11/3/2011	9:28:07 PM	Bypass valve closed
11/3/2011	9:28:07 PM	Helium valve opened
11/3/2011	9:28:07 PM	Bubbler valve opened
11/3/2011	9:28:07 PM	Helium MFC set to  400.000000
11/3/2011	9:28:07 PM	H2 MFC set to  0.000000
11/3/2011	9:28:07 PM	BCl3 MFC set to  0.000000
11/3/2011	9:28:07 PM	PHl3 MFC set to  0.000000
11/3/2011	9:28:07 PM	SiCl4 MFC set to  0.000000
11/3/2011	9:28:07 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:28:07 PM	Tube furnace set to 0
11/3/2011	9:48:07 PM	Helium valve closed
11/3/2011	9:48:07 PM	H2 valve closed
11/3/2011	9:48:07 PM	BCl3 valve closed
11/3/2011	9:48:07 PM	PH3 valve closed
11/3/2011	9:48:07 PM	SiCl4 pre valve closed
11/3/2011	9:48:07 PM	SiCl4 post valve closed
11/3/2011	9:48:07 PM	Main Vac valve closed
11/3/2011	9:48:07 PM	Bypass valve closed
11/3/2011	9:48:07 PM	Bubbler valve closed
11/3/2011	9:48:07 PM	Helium MFC set to  0.000000
11/3/2011	9:48:07 PM	H2 MFC set to  0.000000
11/3/2011	9:48:07 PM	BCl3 MFC set to  0.000000
11/3/2011	9:48:07 PM	PHl3 MFC set to  0.000000
11/3/2011	9:48:07 PM	SiCl4 MFC set to  0.000000
11/3/2011	9:48:07 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	9:48:07 PM	Tube furnace set to 0
11/3/2011	9:48:08 PM	Run finished at 9:48 PM
11/3/2011	10:01:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2011	10:01:58 PM	Recipe started at 10:01 PM
11/3/2011	10:01:58 PM	Helium valve closed
11/3/2011	10:01:58 PM	H2 valve closed
11/3/2011	10:01:58 PM	BCl3 valve closed
11/3/2011	10:01:58 PM	PH3 valve closed
11/3/2011	10:01:58 PM	SiCl4 pre valve closed
11/3/2011	10:01:58 PM	SiCl4 post valve closed
11/3/2011	10:01:58 PM	Main Vac valve closed
11/3/2011	10:01:58 PM	Bubbler valve closed
11/3/2011	10:01:58 PM	Bypass valve opened
11/3/2011	10:01:58 PM	Helium MFC set to  0.000000
11/3/2011	10:01:58 PM	H2 MFC set to  0.000000
11/3/2011	10:01:58 PM	BCl3 MFC set to  0.000000
11/3/2011	10:01:58 PM	PHl3 MFC set to  0.000000
11/3/2011	10:01:58 PM	SiCl4 MFC set to  0.000000
11/3/2011	10:01:58 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:01:58 PM	Tube furnace set to 0
11/3/2011	10:03:03 PM	Helium valve closed
11/3/2011	10:03:03 PM	H2 valve closed
11/3/2011	10:03:03 PM	BCl3 valve closed
11/3/2011	10:03:03 PM	PH3 valve closed
11/3/2011	10:03:03 PM	SiCl4 pre valve closed
11/3/2011	10:03:03 PM	SiCl4 post valve closed
11/3/2011	10:03:03 PM	Main Vac valve closed
11/3/2011	10:03:03 PM	Bubbler valve closed
11/3/2011	10:03:03 PM	Bypass valve opened
11/3/2011	10:03:03 PM	Helium MFC set to  0.000000
11/3/2011	10:03:03 PM	H2 MFC set to  0.000000
11/3/2011	10:03:03 PM	BCl3 MFC set to  0.000000
11/3/2011	10:03:03 PM	PHl3 MFC set to  0.000000
11/3/2011	10:03:03 PM	SiCl4 MFC set to  0.000000
11/3/2011	10:03:03 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:03:03 PM	Tube furnace set to 0
11/3/2011	10:04:03 PM	Helium valve closed
11/3/2011	10:04:03 PM	H2 valve closed
11/3/2011	10:04:03 PM	BCl3 valve closed
11/3/2011	10:04:03 PM	PH3 valve closed
11/3/2011	10:04:03 PM	SiCl4 pre valve closed
11/3/2011	10:04:03 PM	SiCl4 post valve closed
11/3/2011	10:04:03 PM	Bypass valve closed
11/3/2011	10:04:03 PM	Bubbler valve closed
11/3/2011	10:04:03 PM	Main Vac valve opened
11/3/2011	10:04:03 PM	Helium MFC set to  0.000000
11/3/2011	10:04:03 PM	H2 MFC set to  0.000000
11/3/2011	10:04:03 PM	BCl3 MFC set to  0.000000
11/3/2011	10:04:03 PM	PHl3 MFC set to  0.000000
11/3/2011	10:04:03 PM	SiCl4 MFC set to  0.000000
11/3/2011	10:04:03 PM	Bypass solenoid MFC set to  0.000000
11/3/2011	10:04:04 PM	Tube furnace set to 0
11/3/2011	10:04:05 PM	Run finished at 10:04 PM
11/3/2011	10:04:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
